Leakage current mechanism and accelerated unified test of lead zirconate titanate thin film capacitors

Yoo, In-Kyeong; Desu, Seshu B.

doi:10.1109/isaf.1992.300669

Cited by 7 publications

(1 citation statement)

References 5 publications

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“…Very important for the above-mentioned applications is the interaction of the thin film and the electrodes. This interaction considerably influences the effective electrical properties of the whole structure, for example the leakage current dependence [4][5][6] and the polarization fatigue [7]. In this study the differences between the polarization properties of BaTiO 3 (BTO) thin films with metallic electrodes and perovskite electrodes are discussed based on a model of a passive layer between electrodes and film.…”

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confidence: 99%

Electrode influence on the polarization properties of thin films prepared by off-axis laser deposition

Kaemmer

Huelz

Holzäpfel

et al. 1997

J. Phys. D: Appl. Phys.

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and thin-film capacitors have been grown on (001) and MgO(001) substrates by off-axis laser deposition. Reflection high-energy electron diffraction (RHEED) and pole figures have revealed the epitaxial growth of the and thin films. The films with metal electrodes show only weak ferroelectric properties. Using as electrode material an essential improvement of the polarization behaviour could be achieved. heterostructures show a typical ferroelectric hysteresis loop with a remanent polarization of and a coercive field of about but with a relatively high leakage current density of about at an applied electrical field of . The improved polarization behaviour and the higher leakage current density of the all-perovskite structure is compared to those of the system. The differences are discussed on the basis of a Schottky-like depletion layer formation at the - electrode interface.

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confidence: 99%