Ru/Sr multilayer mirrors for the spectral range 9-12 nm

Abstract

The results of studies of Ru/Sr multilayer mirrors optimized for the working wavelength range of 9-12 nm are presented in the paper. Within the framework of the presented article the strontium based multilayer structures with stable over time reflective characteristics were obtained for the first time. It is shown that Ru/Sr mirrors have the highest reflectance of all known reflective coatings, with the exception of beryllium-containing, in the spectral range of 9-12 nm. Keywords: multilayer X-ray mirrors, X-ray lithography, X-ray radiation.

Investigation of structural and reflective characteristics of short-period Mo/B4C multilayer X-ray mirrors

“…Furthermore, there is no degradation of the interfaces in the Mo/B 4 C structures at periods up to 10 A ˚. Fifth, the study of thermal stability during vacuum annealing up to 300 � C showed the high stability of the reflective characteristics of short-period Mo/B 4 C mirrors as had been previously observed for samples with long periods (Shaposhnikov et al, 2023).…”