Route to Three-Dimensional Metallized Microstructures Using Cross-Linkable Epoxide SU-8

Chen, Yunsheng; Tal, Amir; Kuebler, Stephen M.

doi:10.1021/cm0710812

Cited by 41 publications

(29 citation statements)

References 23 publications

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“…This method has been succesfully implemented in 2006 using acrylate [46] and in 2007 using epoxy-based materials [47]. Up to now much effort has been made in hybrid (organic-inorganic) material synthesis specialy designed for DLW 3D micro-/nanostructuring [48].…”

Section: Discussionmentioning

confidence: 99%

Microfabrication of 3D metallic interconnects via direct laser writing and chemical metallization

Jonavičius¹,

Rekštytė²,

Malinauskas³

2014

Lith. J. Phys.

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We present a developed method based on direct laser writing (DLW) and chemical metallization (CM) for microfabrication of three-dimensional (3D) metallic structures. Such approach enables manufacturing of free-form electro-conductive interconnects which can be used in integrated electric circuits such as micro-opto-electro-mechanical systems (MOEMS). The proposed technique employing ultrafast high repetition rate lasers enables efficient fabrication of 3D microstructures on dielectric as well as conductive substrates. The produced polymer links out of organic-inorganic composite matrix after CM serve as interconnects of separate metallic contacts; their dimensions are: height 15 μm, width 5 μm, length 35-45 μm, and they could provide 300 nΩm resistivity measured in a macroscopic way. This proves the techniques potential for creating integrated 3D electric circuits at microscale.

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Section: Discussionmentioning

confidence: 99%

Microfabrication of 3D metallic interconnects via direct laser writing and chemical metallization

Jonavičius¹,

Rekštytė²,

Malinauskas³

2014

Lith. J. Phys.

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“…• C. The cross-linked polymeric films were functionalized with ethylene diamine (Chen et al, 2007), tetraethylenepentamine or N-aminoethylenepeparazine. Functionalization with ethylene diamine was achieved by immersing the cross-linked polymer film into a 20% 1, 2-diaminoethane (Acros, Belgium) (CAS# 107-15-3) in ethanol for 60 min, rinsing with copious ethanol, then water, then allowing to dry by standing in air.…”

Section: Polymer Cross-linking and Reduction By Nabhmentioning

confidence: 99%

Nanoscale characterization of gold nanoparticles created by in situ reduction at a polymeric surface

Dutta

Clukay

Grabill

et al. 2013

Journal of Microscopy

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SummaryTransmission Electron Microscopy is used as a quantitative method to measure the shapes, sizes and volumes of gold nanoparticles created at a polymeric surface by three different in situ synthesis methods. The atomic number contrast (Z-contrast) imaging technique reveals nanoparticles which are formed on the surface of the polymer. However, with certain reducing agents, the gold nanoparticles are additionally found up to 20 nm below the polymer surface. In addition, plan-view high-angle annular dark-field scanning transmission electron microscopy images were statistically analyzed on one sample to measure the volume, height and effective diameter of the gold nanoparticles and their size distributions. Depth analysis from high-angle annular dark-field scanning transmission electron microscopy micrographs also gives information on the dominant shape of the nanoparticles.

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“…bler and co-workers have shown that a wide range of polymers can be functionalized amines using a lithium aminolysis reaction, after which electroless metal deposition can be performed [84,85]. Fourkas and co-workers have developed a gentle and highly selective chemical procedure for functionalizing the surfaces of acrylic polymers with amines, and have demonstrated the deposition of both gold and copper on three-dimensional structures [27].…”

Section: Applicationsmentioning

confidence: 99%

Recent progress in multiphoton microfabrication

Maruo

Fourkas

2008

Laser & Photonics Reviews

356

245

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Multiphoton microfabrication enables the production of three-dimensional microstructures with sub-100 nm resolution via direct laser writing using a femtosecond, pulsed laser beam. The range of materials available for multiphoton processing has increased steadily over the past decade, and the extent of potential applications has increased correspondingly. Current application areas include photonics, microelectromechanical systems, and microelectronics. We review the fundamentals of multiphoton microfabrication and recent progress on materials and applications. Approaches for the mass production of threedimensional structures created with multiphoton fabrication are also discussed.An optical micrograph of a metallized inductor created with multiphoton polymerization.

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Route to Three-Dimensional Metallized Microstructures Using Cross-Linkable Epoxide SU-8

Cited by 41 publications

References 23 publications

Microfabrication of 3D metallic interconnects via direct laser writing and chemical metallization

Microfabrication of 3D metallic interconnects via direct laser writing and chemical metallization

Nanoscale characterization of gold nanoparticles created by in situ reduction at a polymeric surface

Recent progress in multiphoton microfabrication

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