Recent progress in multiphoton microfabrication

Abstract

Multiphoton microfabrication enables the production of three-dimensional microstructures with sub-100 nm resolution via direct laser writing using a femtosecond, pulsed laser beam. The range of materials available for multiphoton processing has increased steadily over the past decade, and the extent of potential applications has increased correspondingly. Current application areas include photonics, microelectromechanical systems, and microelectronics. We review the fundamentals of multiphoton microfabrication and recent progress on materials and applications. Approaches for the mass production of threedimensional structures created with multiphoton fabrication are also discussed.An optical micrograph of a metallized inductor created with multiphoton polymerization.

Direct laser writing of three-dimensional network structures as templates for disordered photonic materials

“…Submicron-scale periodic patterns, such as photonic crystals, can be produced with multibeam interference lithography [28] and proximity field nanopatterning [29]. Probably the most versatile highresolution 3D lithography, however, is two-photon direct laser writing (DLW) [23,26,30]. Here, a polymer photoresist absorbs two infrared photons simulateously and the combined energy leads to solidification of the resist.…”

Optical screw-wrench for microassembly

“…The resolution depends on the optical configuration, for example, the numerical aperture (NA) of the focusing objective, the scanning speed, the laser power, and the properties of the photosensitive material. Resolutions of less than 100 nm have been reported 1,20 .…”

“…To manufacture such devices with functional integration at the micro-or nanometer scale, microstereolithography processes can be utilized. In recent years, twophoton polymerization (2PP or TPP) has emerged as a powerful tool for the fabrication of three-dimensional (3D) microstructures 1 . The high resolution and high degree of design flexibility conferred by 2PP means that it can be applied to different microfluidic applications in which liquid fluids need to be transported, mixed, or controlled by means of valves or switches 2 .…”

Desenvolvimento de um obturador de feixe óptico utilizando um disco rígido de computador

“…Esta dependência não linear com a intensidade da radiaçãó e a característica responsável pelo confinamento espacial da excitação, que confereà técnica resolução abaixo do limite de difração. [7] Ademais, diferentes polímeros podem ser utilizados para a fabricação das microestruturas, tornando a técnica viável para uma vasta gama de aplicações. O aparato experimental para a microfabricação via FA2P está ilustrado na Fig.…”