Room temperature CO sensor fabricated from Pt-loaded SnO2 porous nanosolid

Wang, Kang; Zhao, Tianyu; Lian, Gang; Yu, Qinqin; Luan, Chunhong; Wang, Qilong; Cui, Deliang

doi:10.1016/j.snb.2013.04.054

Cited by 86 publications

(42 citation statements)

References 44 publications

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“…16 In the case of CO, measurement of gas in low ppm concentrations typically requires a noble metal catalyst or high temperature. 14,17 …”

Section: Resultsmentioning

confidence: 99%

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Mills¹,

Lim²,

Lee³

et al. 2015

ECS J. Solid State Sci. Technol.

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This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO 2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO 2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems. High levels of ozone (O 3 ) have been shown to contribute to respiratory symptoms such as chronic cough, wheeze, and shortness of breath and chest colds with phlegm.1 Individuals suffering with respiratory diseases such as asthma are particularly sensitive to O 3 which can trigger an asthma attack hours after exposure.2 According to the Environmental Protection Agency, O 3 concentrations are higher near urban areas, highways and in general outside on hot sunny days highlighting the need for continuous, portable, real time monitoring of an individual's exposure levels in order to correlate personal health with surrounding environments. Sensors used for these applications must have high sensitivity, appropriate selectivity against other gases, low total power consumption, stability, accuracy, reliability and low cost. Among several sensing materials, SnO 2 has been shown to be sensitive toward gases in a variety of papers however metal oxide sensors typically require high operating temperatures to achieve good sensitivity and fast recovery resulting in mW of power consumption making them unsuitable for portable monitoring.3-6 Several reports exist utilizing metal oxides at room temperature but they typically display response and recovery times greater than 10 minutes which also renders them unsuitable for real time monitoring. [7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively. These methods enable detection of 10s of ppb of ozone with room temperature operation for average power consumption of just 150 μW. Additionally, our sensors demonstrate selectivity over interfering gases NO 2 and CO at typical atmospheric levels making them good candidates for continuous, portable monitoring. ExperimentalThe fabrication of sensor device started with 500nm thermal oxidation of Si (100) substrate for electrical isolation. After oxidation, the SnO 2 sensing material was deposited in an ALD system (Cambridge Nanotech Savannah 100 model). Tetrakis(dimethylamino)tin precursor and O 3 reactants were used to deposit SnO 2 at 200• C. The films were...

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“…16 In the case of CO, measurement of gas in low ppm concentrations typically requires a noble metal catalyst or high temperature. 14,17 …”

Section: Resultsmentioning

confidence: 99%

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Mills¹,

Lim²,

Lee³

et al. 2015

ECS J. Solid State Sci. Technol.

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“…В последнее время появились работы по созданию датчиков газа, работающих при комнатной температуре или близкой к ней [4][5][6]. Такие О.С.…”

Section: поступило в редакцию 23 декабря 2016 гunclassified

Фазовый Состав Тонких Пленок Оксида Олова, Газочувствительных При Температуре, Близкой К Комнатной

Махди

Маляр²,

Захаревич³

et al. 2017

Письма В Журнал Технической Физики

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Исследован фазовый состав тонких поликристаллических пленок оксида олова на кремниевых подложках, полученных методом реактивного высокоча-стотного магнетронного распыления и обладающих чувствительностью к парам этанола при 38• C. Было установлено, что они состоят из кристаллов SnO 2 со средним размером порядка 7 nm, покрытых нанометровым слоем аморфной фазы SnO. Также было установлено, что объемное содержание первой фазы составляет порядка 95%, а второй фазы -5%. Проведенный расчет текстуры показал, что имеется преимущественный рост кристаллов SnO 2 вдоль кристал-лографических направлений 110 , 211 и 310 перпендикулярно подложке.

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“…Such PNSs are believed to possess both high reactivity of nanoparticles and strength of nanoceramics, which would be especially attractive for gas sensing applications. A sensitivity of 19 for 4000 ppm CO at 300 ℃ has been observed for sensors based on SnO 2 PNSs [12], and Pt-loaded SnO 2 PNSs were even found to show obvious responses to CO at room temperature [13], although their response and recovery time are still needed to be shortened. As a matter of fact, with very large specific surface areas and high surface free energies, nanoparticles in contact can become connected to one another at contact points at relatively low temperatures [14], which is usually known as premature sintering, primarily in the case of sintering materials having a nanostructure, and leads to the formation of a highly porous microstructure with obviously enhanced mechanical strength.…”

Section: Introductionmentioning

confidence: 99%

Gas sensing capabilities of TiO2 porous nanoceramics prepared through premature sintering

et al. 2015

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Pure and noble metal (Pt, Pd, and Au) doped TiO 2 nanoceramics have been prepared from TiO 2 nanoparticles through traditional pressing and sintering. For those samples sintered at 550 ℃, a typical premature sintering occurred, which led to the formation of a highly porous microstructure with a Brunauer-Emmett-Teller (BET) specific surface area of 23 m 2 /g. At room temperature, only Pt-doped samples showed obvious response to hydrogen, with sensitivities as high as ~500 for 1000 ppm H 2 in N 2 ; at 300 ℃, all samples showed obvious responses to CO, while the responses of noble metal doped samples were much higher than that of the undoped ones. The mechanism for the observed sensing capabilities has been discussed, in which the catalytic effect of Pt for hydrogen is believed responsible for the room-temperature hydrogen sensing capabilities, and the absence of glass frit as commonly used in commercial thick-film metal oxide gas sensors is related to the high sensitivities. It is proposed that much attention should be paid to metal oxide porous nanoceramics in developing gas sensors with high sensitivities and low working temperatures.

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Room temperature CO sensor fabricated from Pt-loaded SnO2 porous nanosolid

Cited by 86 publications

References 44 publications

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Фазовый Состав Тонких Пленок Оксида Олова, Газочувствительных При Температуре, Близкой К Комнатной

Gas sensing capabilities of TiO2 porous nanoceramics prepared through premature sintering

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Room temperature CO sensor fabricated from Pt-loaded SnO2 porous nanosolid

Cited by 86 publications

References 44 publications

Atomic Layer Deposition of SnO2for Selective Room Temperature Low ppb Level O3Sensing

Atomic Layer Deposition of SnO2for Selective Room Temperature Low ppb Level O3Sensing

Фазовый Состав Тонких Пленок Оксида Олова, Газочувствительных При Температуре, Близкой К Комнатной

Gas sensing capabilities of TiO2 porous nanoceramics prepared through premature sintering

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Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing