Roll angle measurement system based on differential plane mirror interferometer

Shi, Kai; Su, Junhong; Hou, Wenmei

doi:10.1364/oe.26.019826

Cited by 18 publications

(7 citation statements)

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“…In traditional interferometer solutions, in order to be able to measure angles, the displacement is usually first calculated using the phase, and then the angle is solved [ 120 ].…”

Section: High-precision With Single Axismentioning

confidence: 99%

“…In traditional interferometer solutions, in order to be able to measure angles, the displacement is usually first calculated using the phase, and then the angle is solved [120]. In traditional interferometer solutions, in order to be able to measure angles, the displacement is usually first calculated using the phase, and then the angle is solved [120].…”

Section: (B) Heterodyne Interferencementioning

confidence: 99%

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A Review: High-Precision Angle Measurement Technologies

Wang,

Ma,

Cao

et al. 2024

Sensors

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Angle measurement is an essential component of precision measurement and serves as a crucial prerequisite for high-end manufacturing. It guides the implementation of precision manufacturing and assembly. The current angle measurement methods mainly focus on multiple axes, high precision, and large measurement ranges. This article introduces the technology of angle measurement from the perspectives of single-axis and multi-axis measurement schemes. Firstly, the single-axis measurement scheme is primarily achieved through optical methods, such as encoder discs that measure energy changes and interferometric phase changes, as well as mechanical, electromagnetic, and inertial angle measurement methods, among which interferometric methods offer the highest accuracy, with high cost, and encoder discs provide the largest measurement range with an ordinary price. Secondly, in the multi-axis measurement scheme, autocollimation instruments, including plane mirrors, gratings, and self-designed targets, are the main options. Although grating encoders can achieve three degrees of freedom in angle measurement with an ordinary price, they are limited in terms of measurement range and sensitivity compared to self-designed targets. Lastly, artificial intelligence assistance precision measurement is increasingly being embraced due to significant advancements in computer performance, making it more convenient to identify the relationship between measured values and detection values. In conclusion, angle measurement plays a crucial role in precision manufacturing, and the evolving and improving technologies provide the manufacturing industry with greater choices. The purpose of this review is to help readers quickly find more suitable technical solutions according to current application requirements, such as single/multiple axes, accuracy level, measuring range, budget, etc.

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“…In traditional interferometer solutions, in order to be able to measure angles, the displacement is usually first calculated using the phase, and then the angle is solved [ 120 ].…”

Section: High-precision With Single Axismentioning

confidence: 99%

Section: (B) Heterodyne Interferencementioning

confidence: 99%

A Review: High-Precision Angle Measurement Technologies

Wang,

Ma,

Cao

et al. 2024

Sensors

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“…Extensive research on HIFs has been carried out and published, whereas HIFs are utilized for displacement measurements by Lawall et al [7], Gillmer et al [8], Yan et al [9], and Yu et al [10]. Other publications, such as Shi et al [11] or Jin et al [12], use heterodyne multi-beam interferometers for straightness and roll angle measurements. All the mentioned publications, except for Jin et al, use optical setups based on the classic Michelson interferometer design.…”

Section: State Of the Artmentioning

confidence: 99%

A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

et al. 2021

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As standard concepts for precision positioning within a machine reach their limits with increasing measurement volumes, inverse concepts are a promising approach for addressing this problem. The inverse principle entails other limitations, as for high-precision positioning of a sensor head within a large measurement volume, three four-beam interferometers are required in order to measure all necessary translations and rotations of the sensor head and reconstruct the topography of the reference system consisting of fixed mirrors in the x-, y-, and z-directions. We present the principle of a passive heterodyne laser interferometer with consequently separated beam paths for the individual heterodyne frequencies. The beam path design is illustrated and described, as well as the design of the signal-processing and evaluation algorithm, which is implemented using a System-On-a-Chip with an integrated FPGA, CPU, and A/D converters. A streamlined bench-top optical assembly was set up and measurements were carried out to investigate the remaining non-linearities. Additionally, reference measurements with a commercial homodyne interferometer were executed.

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“…Some improvements are reported to solve this problem. A wedge prism and a wedge mirror are set in the interferometer so that the roll displacement of the wedge prime will induce an OPL change in the measuring arm [14,15]. This method detects the phase shift that is caused by the change of OPL.…”

Section: Introductionmentioning

confidence: 99%

Heterodyne interferometer with two parallel-polarized input beams for high-resolution roll angle measurement

Qi¹,

Zhao²,

Wang³

et al. 2019

Opt. Express

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Roll angle measurement system based on differential plane mirror interferometer

Cited by 18 publications

References 0 publications

A Review: High-Precision Angle Measurement Technologies

A Review: High-Precision Angle Measurement Technologies

A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

Heterodyne interferometer with two parallel-polarized input beams for high-resolution roll angle measurement

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