Heterodyne interferometer with two parallel-polarized input beams for high-resolution roll angle measurement

Abstract

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0–360 Degrees angular measurements using spatial displacement

“…These measurement techniques offer high precision, non-contact, and nondestruction as compared to other means of measurements. [2][3][4][5][6][7][8][9][10][11] These techniques exploit for instance autocollimation, 2 intersection feedback with self-mixing interferometry, 3 heterodyne interferometry, [4][5][6][7] parallel plate interferometry, 8 grating-based interferometry, 9 polarization interferometry, 10,11 the orthogonal mirror self-mixing interferometry, 12 modified hybrid interferometry, 13 dual-Laser Doppler vibrometers, 14 and the attosecond-precision interferometric method. 15 Recently, the angle sensor [16][17][18][19] and quantum metrology 15,20,21 provide new methods to enhance the precision of angular measurements.…”