Role of photostriction and photothemal effects in photon induced deflection of Si microcantilevers

Resonant‐Opto‐Thermomechanical Oscillator (ROTMO): A Low‐Power, Large Displacement, High‐Frequency Optically Driven Microactuator

“…Actuators based on optical pressure and gradient forces [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17] can provide high-frequency mechanical excitation, but can only produce limited displacements. Indirect methods, like opto-thermal actuators, [18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34] opto-strictive actuators, [35,36] or related photomechanical crystalline materials, [37] can provide larger displacements, [22][23][24][25] but with limited actuation frequencies. Furthermore, many of these actuation principles depend on high optical drive powers or complex optoelectronic drive systems.…”