The design and fabrication of a miniature fiber Fabry-Perot pressure sensor with a diameter of 125 microm are presented. The essential element in the process is a thin SiO2 diaphragm that is fusion spliced at the hollow end of an optical fiber. Good repeatability and high sensitivity of the sensor are achieved by on-line tuning of the diaphragm thickness during the sensor fabrication process. Various sensor prototypes were fabricated, demonstrating pressure ranges of from 0 to 40 kPa to 0 to 1 MPa. The maximum achieved sensitivity was 1.1 rad/40 kPa at 1550 nm, and a pressure resolution of 300 Pa was demonstrated in practice. The presented design and fabrication technique offers a means of simple and low-cost disposable pressure sensor production.

This article presents a miniature, high-sensitivity, all-silica Fabry-Perot fiber-optic sensor suitable for simultaneous measurements of pressure and temperature. The proposed sensor diameter does not exceed 125 μm and consists of two low-finesse Fabry-Perot resonators created at the tip of an optical fiber. The first resonator is embodied in the form of a short air cavity positioned at the tip of the fiber. This resonator utilizes a thin silica diaphragm to achieve the sensor's pressure response. The second resonator exploits the refractive index dependence of silica fiber in order to provide the proposed sensor's temperature measurement function. Both resonators have substantially different lengths that permit straightforward spectrally resolved signal processing and unambiguous determination of the applied pressure and temperature.

Needs for sensor miniaturization, versatile sensing solutions, and improved measurements' performances in difficult operating environments have recently driven considerable research in optical fiber sensor for multiparameter measurements. Multiparameter sensors not only enable new sensors' functionalities, but can also improve achievable measurement performances for some frequently measured parameters considerably. This study provides a review of work in the field of miniature fiber-optic sensors that allows independent and simultaneous measurements of two or more different physical or chemical parameters. Sensor designs and corresponding signal processing schemes are reviewed and compared.

The fabrication and experimental investigation of a miniature optical fiber pressure sensor for biomedical and industrial applications are described. The sensor measures only 125 microm in diameter. The essential element is a thin polymer diaphragm that is positioned inside the hollow end of an optical fiber. The cavity at the fiber end is made by a simple and effective micromachining process based on wet etching in diluted HF acid. Thus a Fabry-Perot interferometer is formed between the inner fiber-cavity interface and the diaphragm. The fabrication technique is described in detail. Different sensor prototypes were fabricated upon 125 microm-diameter optical fiber that demonstrated pressure ranges from 0 to 40 and from 0 to 1200 kPa. A resolution of less than 10 Pa was demonstrated in practice. The fabrication technique presented facilitates production of simple and low-cost disposable pressure sensors by use of materials with that ensure the required biocompatibility.

Optical measurement of mechanical parameters is gaining significant commercial interest in different industry sectors. Torsion, twist and rotation are among the very frequently measured mechanical parameters. Recently, twist/torsion/rotation sensors have become a topic of intense fiber-optic sensor research. Various sensing concepts have been reported. Many of those have different properties and performances, and many of them still need to be proven in out-of-the laboratory use. This paper provides an overview of basic approaches and a review of current state-of-the-art in fiber optic sensors for measurements of torsion, twist and/or rotation.