2020
DOI: 10.1016/j.sna.2020.112233
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Wavelength dependence of photothermal deflection in Au/Si bimaterial microcantilevers

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Cited by 3 publications
(2 citation statements)
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“…These intriguing microcomponents have garnered considerable attention in scientific research and have been integral to multidisciplinary studies, given their advantages of high sensitivity [3,4], enhanced reliability [5], and rapid response [6]. In parallel with the development of functional microstructures, the exploration of physico-chemical behavior has unveiled a realm where practical observations on localized nano-objects, under both natural and artificial conditions [7,8], play a pivotal role. This exploration has led to the recognition that these nano-objects can induce distinct shifts in dynamic behavior [9], such as deformation and resonance, arising from various multiphysical parameters.…”
Section: Introductionmentioning
confidence: 99%
“…These intriguing microcomponents have garnered considerable attention in scientific research and have been integral to multidisciplinary studies, given their advantages of high sensitivity [3,4], enhanced reliability [5], and rapid response [6]. In parallel with the development of functional microstructures, the exploration of physico-chemical behavior has unveiled a realm where practical observations on localized nano-objects, under both natural and artificial conditions [7,8], play a pivotal role. This exploration has led to the recognition that these nano-objects can induce distinct shifts in dynamic behavior [9], such as deformation and resonance, arising from various multiphysical parameters.…”
Section: Introductionmentioning
confidence: 99%
“…Compared with photon IR detectors, uncooled IR detectors are more widely used in the non-military field for their ability to work at ambient temperature, which brings lower cost and power consumption. Furthermore, among various types of uncooled detectors, the optomechanical detectors based on the thermal response of bi-material micro-cantilever have been researched a lot [11,12] and shown significant potentials [13][14][15][16] for their simple fabricating, cost-reducing, and more importantly, readout integrated circuits(ROIC) removing [10]. So that the parasitic heat from ROIC is eliminated and there is no thermal leakage path caused by the electrical contacts between pixels and substrate.…”
Section: Introductionmentioning
confidence: 99%