Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens
Zhendong Luo,
Huwang Hou,
Yiyuan Zhang
et al.
Abstract:Optomechanical uncooled infrared (IR) detectors based on the thermal deformation of bi-material micro-cantilever have proved of significant potential in the IR imaging fields. However, compared to other uncooled infrared detectors, the optomechanical type relies on the mechanical deformation of the thermomechanical cantilevers, which compete for space with the absorbers and isolation beams, resulting in limited sensitivity. By integrating a designed metalens, large deformation, high thermal isolation, and high… Show more
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