Abstract:The influence of the oxygen gas supply on the stoichiometry, structure, and orientation texture of polycrystalline cobalt oxide films was investigated in this study. The films were grown by direct current reactive magnetron sputtering using a metallic Co target and different O2 inlet flow rates (0.5–5.0 SCCM). The deposition power (80 W), the argon gas flow (40 SCCM), and the total working pressure (0.67 Pa) were kept constant during depositions. The results evidence a strong influence of the oxygen flow over … Show more
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