Robust PID Controller Design for a micro-Actuator with Squeezed Gas Film Damping Effects

Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

“…SIMULATION RESULTS Simulation studies were carried on a µ-A's nonlinear model, with plates of Si (coated with SiO 2 and Tungstrem) [18]. The parameters of the system are presented in the following Table: parameter (Unit)…”

“…The squeezed film damping effect due to the gas between the moving and stable components strongly affects their performance [17], [18]. It is well known that the thin film layer of air between the planar structures significantly alters the dynamic characteristics of these devices by adding stiffness and viscous damping to the system.…”

“…In the present work the modeling and the analysis of the squeezed film damping effect is investigated in the case of a rectangular [18], [19], parallel plate micro-actuator (µA), whose moving plate is driven by an electrically introduced force and has an additional external spring element [20]. The nonlinear model of the µA is linearized at various operating points in order to investigate its behavior.…”