Modeling aspects and gain scheduled H&lt;inf&gt;&amp;#x221E;&lt;/inf&gt;controller design for an electrostatic micro-actuator with squeezed gas film damping effects

Vagia, Marialena; Tzes, Anthony

doi:10.1109/acc.2009.5160386

Cited by 5 publications

(2 citation statements)

References 33 publications

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“…In the example, the closed-loop poles are restricted to lie inside an LMI region [32], [30] where S has been scaled such that SB = I. The stable matrix Φ from (18) has been chosen as Φ = −10. The stable integral action matrix Γ from (34) and the nonlinear gain ̺ from (19) have been chosen as Γ = −10 and ̺ = 35 respectively.…”

Section: Simulationsmentioning

confidence: 99%

“…In particular, the movement of the upper-plate is controlled by the microactuator's source voltage (via determining the force) and thus the change in gap, while the charge is obtained by a combination of the change in gap and the voltage. For an extended discussion on modelling, the interested reader can refer to [5], [17], [18] and references within. The (original) (1) and (2).…”

Section: Micro-actuator Modelmentioning

confidence: 99%

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Sliding mode control design of an electrostatic microactuator using LPV schemes

Alwi

Zolotas

Edwards

et al. 2012

2012 American Control Conference (ACC)

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This paper presents preliminary results of a robust linear parameter varying (LPV)-based sliding mode voltage controller for a parallel-plate electro-static microactuator. The controller design aims to extend the travelling range of the microactuator plates beyond the, so-called, `pull-in' condition, thus taking advantage of an increased range of operation. The designed controller is successful in extending the microactuator's plates operation beyond the pull-in condition with moderate controller complexity, while guaranteeing robustness against matched uncertainty. Results illustrate, that the controller also provides a degree of robustness to unmatched uncertainty (i.e. spring stiffness variation). Appropriate simulation studies, on the nonlinear normalized microactuator model, are employed to assess the efficacy of the proposed controller

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