A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects

Vagia, Marialena; Tzes, Anthony

doi:10.1109/acc.2010.5530894

Cited by 12 publications

(7 citation statements)

References 49 publications

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“…If L s1 = L s2 , equations (20)- (22) can be simplified as follows u( §, t) = sinh (q §) + qL s1 cosh (q §) (1 + q 2 L 2 s1 ) sinh (qh) + 2qL s1 cosh (qh)…”

Section: Finite Height Of Fluid Gapmentioning

confidence: 99%

Slide film damping in microelectromechanical system devices

Wei-dong

Jia

2013

Proceedings of the Institution of Mechanical Engineers, Part N:

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Film damping caused by microfluids has important effects on the dynamic characteristics of moving elements of microelectromechanical system devices. There are two kinds of film damping existing in microelectromechanical system devices, for instance, slide film damping and squeeze film damping. This article presents an overview on the recent research progress on the slide film damping in microelectromechanical system devices. Based on the first slip velocity boundary conditions, this article discusses two kinds of damping models in detail, which commonly used to investigate on the slide film damping. For the convenience of quick reference in future, laterally moving microstructures, adequate important equations and applicable conditions are included in this article. Finally, we proposed two unified models for the analysis and design of laterally moving microstructured devices.

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“…If L s1 = L s2 , equations (20)- (22) can be simplified as follows u( §, t) = sinh (q §) + qL s1 cosh (q §) (1 + q 2 L 2 s1 ) sinh (qh) + 2qL s1 cosh (qh)…”

Section: Finite Height Of Fluid Gapmentioning

confidence: 99%

Slide film damping in microelectromechanical system devices

Wei-dong

Jia

2013

Proceedings of the Institution of Mechanical Engineers, Part N:

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“…Thus, it is necessary to consider the influence of the fringing effect when calculating the dynamic characteristics of the variable geometry microbeam. Many different formulas for computing fringing fields have been proposed in [26,27] and we compared the difference of dynamic behavior of the microbeam among four typical fringing effect models. The revised formulas of electrostatic force of different models are depicted in appendix.…”

Section: Fringing Effectsmentioning

confidence: 99%

Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

Zhang

Peng

et al. 2015

Shock and Vibration

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We mainly analyze the dynamic characteristics of electrostatically actuated shape optimized variable geometry microbeam. A nonlinear dynamic model considering midplane stretching, electrostatic force, and electrical field fringing effects is developed. Firstly, we study the static responses of the optimized microbeams under DC polarization voltage. The generalized differential quadrature method (GDQM) is used. Secondly, the dynamic responses of the shape optimized microbeams driven by DC and AC voltages are investigated using GDQM in conjunction with Levenberg-Marquardt optimization method. The results show that the more gradual change in width, the larger the resonant frequency and the maximum amplitude at resonance. Then we further discuss in detail how do the maximum width, midsection width, and curvature of the width function affect the frequency response of the microbeams. We find that the amplitude and resonant frequency of the dynamic response are not monotonically increasing as the curvature of the width function increases and there exists a critical curvature. This analysis will be helpful in the optimal design of MEMS actuators. Finally, for more consideration, different residual stress, squeeze-film damping, and fringing effect models are introduced into the governing equation of motion and we compare the corresponding dynamic response.

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“…Control of such structures is fundamental in order to extend their stable operational range and improve the system's overall performance [14][15][16]. Amongst them, nonlinear control techniques [17,18] have been applied and between recently reported methods some of them can be especially stated like: input output linearization, passive based design, application of port controlled hamiltonian systems flatness based control, backstepping design and control based on Lyapunov Function Synthesis.…”

Section: Introductionmentioning

confidence: 99%

On the design of a robust adaptive tracking control scheme for a nano-cantilever beam

Vagia

2012

2012 American Control Conference (ACC)

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An adaptive robust tracking control scheme for a nanomechanical beam under the presence of parametric uncertainties and external disturbances is presented in this article. In the present structure, both fringing field effects and intermolecular forces, like Casimir ones are incorporated in the system's modeling. The controller is enhanced with an adaptive dynamic surface technique and an H ∞ control scheme and is developed to reduce the influence of the parameter uncertainties and external disturbances. In order to check the effectiveness of the designed controller, simulation results are presented. These results show that the desired transient output tracking performance is achieved and also that, the closed loop system exhibits good robustness to system uncertainties. Particular attention, has been paid, so that to identify any relevance between the changes in the controller's design parameters and the system's performance.

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A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects

Cited by 12 publications

References 49 publications

Slide film damping in microelectromechanical system devices

Slide film damping in microelectromechanical system devices

Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

On the design of a robust adaptive tracking control scheme for a nano-cantilever beam

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