RF circuit design aspects of spiral inductors on silicon

Burghartz, Joachim N.; Edelstein, D.; Soyuer, M.; Ainspan, H.; Jenkins, K.A.

doi:10.1109/4.735544

Cited by 198 publications

(27 citation statements)

References 10 publications

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“…3,10 Similar results are encountered in circuit simulation, involving electromagnetic field solvers. 3,10 Similar results are encountered in circuit simulation, involving electromagnetic field solvers.…”

mentioning

confidence: 53%

Micron-sized planar transformer for electromagnetic flux guidance and confinement

Kerner

Magnus

Golubović

et al. 2004

Applied Physics Letters

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mentioning

confidence: 53%

Micron-sized planar transformer for electromagnetic flux guidance and confinement

Kerner

Magnus

Golubović

et al. 2004

Applied Physics Letters

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“…Here conductors of width w m and thickness t m are separated from a Si substrate of thickness t s by a thin layer of insulator (for example, SiO 2 ) of thickness t Ox . For low frequencies the well-known lumped-element equivalent circuit in figure 3(b) [16,17] can be used. The coil is an inductance L C in series with a resistance R C , and coupled to the substrate by an oxide spacer, represented by the two capacitors C Ox .…”

Section: Equivalent Circuitmentioning

confidence: 99%

“…Q-factors are limited by capacitative coupling through the substrate, which gives rise to an additional lossy parasitic resonance. These problems are well understood in RF IC design [16,17], and have been addressed by undercutting [18]. Table 1 contains a summary of some recent micro-coil performance.…”

Section: Introductionmentioning

confidence: 99%

Microengineered needle micro-coils for magnetic resonance spectroscopy

Syms

Ahmad

Young

et al. 2006

J. Micromech. Microeng.

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A process for batch fabrication of low-cost needle-shaped micro-coils for magnetic resonance (MR) spectroscopy is demonstrated. The conductors are embedded inside a cross-section designed to avoid the signal cancellation effects that can occur with completely immersed detectors. Simple models are developed for the sensitivity of an immersed coil and for the electrical performance of coils on silicon substrates. Conductors are fabricated on oxidized Si by electroplating metals inside a deep photoresist mould, and then capped with a thick layer of plastic. Through-wafer deep reactive ion etching is used to define needle shapes. At 63.8 MHz frequency, Q-factors obtained on Si are comparable to those on glass, and resonators based on single-turn coils have Q-factors of ≈14. Total immersion 1 H MR imaging and spectroscopy are demonstrated in a 1.5 T magnetic field using tomato fruits. Q-factors are raised at higher frequencies (to >30 at 255 MHz) using thick polymer isolation, and hybrid integration of additional circuitry is demonstrated.

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“…There have been two prior approaches for the enhancement of Q factor; one is to reduce the resistive component of the inductor itself and the other to reduce the parasitic components of the lossy silicon substrate. As for the former approach the material of the metal strip is now shifting from aluminum to lower resistance materials such as copper or silver [3] in pursuit of the leverage of thick metallization [4,5]. As for the latter approach the guard-ring technique [1] that suppresses the parasitic current in silicon substrate was introduced although the shielding effect is questionable from a practical point of view.…”

Section: Introductionmentioning

confidence: 98%