Resonating piezoelectric membranes for microelectromechanically based bioassay: detection of streptavidin–gold nanoparticles interaction with biotinylated DNA

Nicu, Liviu; Guirardel, Matthieu; Chambosse, Frédéric; Rougerie, Pierre; Hinh, Sary; Trévisiol, Emmanuelle; François, Jean; Majoral, Jean Pierre; Caminade, Anne‐Marie; Cattan, Éric; Bergaud, Christian

doi:10.1016/j.snb.2005.01.021

Cited by 76 publications

(52 citation statements)

References 15 publications

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“…Piezoelectric devices are highly attractive for biosensor applications due to their high sensitivity and stability [1][2][3][4]. Several materials are used and, up to now, quartz crystal remains the reference material [3][4][5][6] for bulk acoustic wave and surface acoustic wave resonators (QCM) with high stability.…”

Section: Introductionmentioning

confidence: 99%

Design and microfabrication of a lateral excited gallium arsenide biosensor

Bienaime

Liu

Élie-Caille

et al. 2011

Eur. Phys. J. Appl. Phys.

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GaAs crystal presents some interesting perspectives for resonant biosensors due to its piezoelectric and good mechanical properties and the opportunity to bio-functionalize the surface. Moreover, GaAs can be micromachined by wet etching in several solutions, which constitutes a batch and low-cost process of fabrication. The lateral field excitation (LFE) is used to generate bulk acoustic waves. The main advantage of LFE is the possibility to measure in liquid media, but moreover reduced aging and increased frequency stability are also ensured. In this study, an analytical modelisation is used to determine the orientations of the vibrating membrane and the electric field that give satisfactory metrological performances. Electrical performances are discussed as a function of geometrical parameters. A simulation based on a Finite Element Modelisation is performed in order to optimize the design of the resonant structure. The microfabrication process of the structure is presented. The choice of etchants is discussed in terms of etch rates and surface textures. Several steps of the fabrication of the sensing area structure are shown and characterized. Finally, the active area is fabricated according to the theoretical and experimental results of this study.

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Section: Introductionmentioning

confidence: 99%

Design and microfabrication of a lateral excited gallium arsenide biosensor

Bienaime

Liu

Élie-Caille

et al. 2011

Eur. Phys. J. Appl. Phys.

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“…The latter aspect, related to the damping of the cantilevers oscillation in liquid, directly (and unfavorably) impacts the minimum detectable mass and subsequently, the signal-to-noise ratio of the sensor. Since a couple of years, attempts have been made to propose alternative solutions to the well-established cantilever design like disk-like shaped structures [4] or membranes [5][6][7]. The membrane design appeared as being interesting for biosensing purpose not only due to its use as pMUT [8] for biomedical applications but also because of easy-to-functionalize active area, high quality factors in liquid and dynamic behavior in liquid independent of viscosity (in a certain regime) which is relevant for biosensing in blood samples (which viscosity is fourfold the water's [7]).…”

Section: Introductionmentioning

confidence: 99%

Actuation and sensing integration challenges at the microscale: the Gordian Knot of the resonant bioMEMS realm

Nicu

Alava²,

Mathieu³

et al. 2010

2010 IEEE International Frequency Control Symposium

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Sensing platforms (5mm*5mm) containing 5 piezoelectric membranes have been fabricated by standard micromachining techniques starting with a Silicon-On-Insulator wafer. Each membrane (circular, with radius varying from 360 microns to 440 microns) could be individually actuated through a PZT 1-micron thick film and sensed either via the same piezoelectric patch or via two terminal piezoresistances (obtained by boron implantation) placed at high-stress location onto the devices. Specific associated electronics (bandwidth of 2 MHz) have been designed and realized so that multiplexed actuation and sensing of all membranes resonant frequencies can be performed either in open-loop or closed-loop mode.

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“…To overcome the problems arising from the QCM and cantilever biosensors, micro-machined piezoelectric membrane based sensor array is one of the alternative candidates [6]. We previously reported a piezoelectric biosensor array for detecting 2 types of antigens simultaneously [7].…”

Section: Introductionmentioning

confidence: 99%

Self-Polarized Piezoelectric Biosensor Array for Multiple Immunoassys Applications

Miao

Wang

et al. 2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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This paper reports a novel microfabricated selfpolarized piezoelectric biosensor array for simultaneous detection of 3 different types of antigens. This array consists of 8 individual circular sensors with a diameter of 1 mm and self-polarization because of the stress accumulated in the piezoelectric membrane during the fabrication process. HBsAg, HBcAg and oc-Fetoprotein (AFP) were immobilized onto sensing surface as the probe molecules. Due to the mass sensitive nature of these sensors, their resonant frequencies were depressed after the target anti-bodies were captured by the probe molecules. A clear frequency depression was observed and the mass sensitivity of the device is estimated to be about 4.80 Hz/ng. The preliminary results demonstrate that the developed piezoelectric biosensor array has potential applications for multiple immunoassys.

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Resonating piezoelectric membranes for microelectromechanically based bioassay: detection of streptavidin–gold nanoparticles interaction with biotinylated DNA

Cited by 76 publications

References 15 publications

Design and microfabrication of a lateral excited gallium arsenide biosensor

Design and microfabrication of a lateral excited gallium arsenide biosensor

Actuation and sensing integration challenges at the microscale: the Gordian Knot of the resonant bioMEMS realm

Self-Polarized Piezoelectric Biosensor Array for Multiple Immunoassys Applications

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