Design and microfabrication of a lateral excited gallium arsenide biosensor

Bienaime, Alex; Liu, L.; Élie-Caille, Céline; Leblois, Thérèse

doi:10.1051/epjap/2011110111

Cited by 16 publications

(12 citation statements)

References 36 publications

(45 reference statements)

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“…The first one forms thickness controls and the second one etches the membrane. The details of this process are reported in the paper [4] and the choice of wet etching baths and the etching conditions are detailed in [5]. An experimental set up has been realized which integrates the electrical connection and microfluidic ports (Figure 4).…”

Section: Methodsmentioning

confidence: 99%

GaAs Lamb wave micro sensor

Manceau

Billot

Lacour

et al. 2015

Proceedings of 2nd International Electronic Conference on Sensors and Applications

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Acoustic Lamb Wave microsensors are suitable for label free sensing in liquid. The device relies on the interaction between acoustic waves propagating within a thin membrane and the liquid. Lamb wave sensors have been previously studied using AlN/Si structure to detect multi-parameters of a liquid, such as its temperature, density, sound velocity and viscosity using various modes as A0 and S0. These devices already showed good ability to perform measurements on fluids (gas or liquid). In this case, wet chemical etching of silicon was used to obtain thin membranes and an AlN piezoelectric layer was deposited to generate and detect the acoustic wave. This paper reports the use of Gallium Arsenide as piezoelectric material to generate and propagate Lamb waves. GaAs material presents intrinsically interesting piezoelectric properties and is compatible with wet chemical etching process. The fabrication process allows producing a thin membrane but is also adapted for microfluidic microchannels. So, the same substrate can be used for the resonant structure and its excitation. The design of the resonant structure has been optimized using simulations to adapt the design of interdigital electrodes to the GaAs substrate taking into account the shear piezoelectric coefficient and its orientation. An experimental setup has been realized and measurements of the interaction with fluids are presented.

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Section: Methodsmentioning

confidence: 99%

GaAs Lamb wave micro sensor

Manceau

Billot

Lacour

et al. 2015

Proceedings of 2nd International Electronic Conference on Sensors and Applications

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“…The global objective for the biosensor is at least to match the resolution of a standard SPR system that is placed somewhere near 0.1 nmol/L (or commonly described as 0.1 nM with M, named molar, representing the 1 mol/L concentration) [ 12 , 13 ]. The sensor ( Figure 1 ) separates the fluidic and the sensitive parts [ 14 ], allowing one to optimize them independently, and particularly ensuring good compatibility between bio-interface grafting and etching [ 15 , 16 ]. The sensitive part of the sensor has been described elsewhere [ 14 ], but we will present the main point of its design to better understand the key parameters of the fluidic interface.…”

Section: Design and Simulationmentioning

confidence: 99%

A Fluidic Interface with High Flow Uniformity for Reusable Large Area Resonant Biosensors

et al. 2017

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Resonant biosensors are known for their high accuracy and high level of miniaturization. However, their fabrication costs prevent them from being used as disposable sensors and their effective commercial success will depend on their ability to be reused repeatedly. Accordingly, all the parts of the sensor in contact with the fluid need to tolerate the regenerative process which uses different chemicals (H3PO4, H2SO4 based baths) without degrading the characteristics of the sensor. In this paper, we propose a fluidic interface that can meet these requirements, and control the liquid flow uniformity at the surface of the vibrating area. We study different inlet and outlet channel configurations, estimating their performance using numerical simulations based on finite element method (FEM). The interfaces were fabricated using wet chemical etching on Si, which has all the desirable characteristics for a reusable biosensor circuit. Using a glass cover, we could observe the circulation of liquid near the active surface, and by using micro-particle image velocimetry (μPIV) on large surface area we could verify experimentally the effectiveness of the different designs and compare with simulation results.

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“…Moreover, the characteristic "etching profiles" that are generated (data not shown) are particularly interesting for the GaAs membrane fabrication 19 and the reproducibility is really good due to the stability of this etching bath.…”

Section: Influence Of Etching Bath Concentrationmentioning

confidence: 99%

“…of the sensor and the electronic part, thanks to a lateral field excitation (LFE). [16][17][18][19] In this study, we focused on the microstructuration of the vibrating membrane that constitutes the sensing surface. The membrane is the location of the biofunctionalization and allows the detection of biomolecules of interest through its mechanical behavior.…”

Section: Introductionmentioning

confidence: 99%

Micro Structuration of GaAs Surface by Wet Etching: Towards a Specific Surface Behavior

Bienaime

Élie-Caille

Leblois

2012

j nanosci nanotechnol

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Resonant microelectromechanical systems are promising devices for real time and highly sensitive measurements. The sensitivity of such sensors to additional mass loadings which can be increased thanks to the miniaturisation of devices is of prime importance for biological applications. The miniaturisation of structures passes through a photolithographic process and wet chemical etching. So, this paper presents new results on the anisotropic chemical etching of the gallium arsenide (GaAs) crystal used for this application, in several solutions. This paper focuses on the micro/nanostructuration of the sensing surface to increase the sensor sensitivity. Indeed, this active surface will be biofunctionalized to operate in biological liquid media in view of biomolecules detection. Several experimental conditions of etching bath composition, concentration and temperature were examined to obtain a large variety of geometrical surfaces topographies and roughness. According to the orientation dependence of the chemical etching process, the experiments were also performed on various GaAs crystal plates. The bath 1 H3PO4:9 H2O2:1 H2O appeared to be particularly adapted to the fabrication of the GaAs microstructured membrane: indeed, the bath is highly stable, anisotropic, and, as a function of temperature, it allows the production of a large variety of GaAs surface topographies.

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Design and microfabrication of a lateral excited gallium arsenide biosensor

Cited by 16 publications

References 36 publications

GaAs Lamb wave micro sensor

GaAs Lamb wave micro sensor

A Fluidic Interface with High Flow Uniformity for Reusable Large Area Resonant Biosensors

Micro Structuration of GaAs Surface by Wet Etching: Towards a Specific Surface Behavior

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