Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

Filhol, F.; Defaÿ, E.; Divoux, C.; Zinck, C.; Delaye, M.T.

doi:10.1016/j.sna.2005.04.029

Cited by 105 publications

(68 citation statements)

References 2 publications

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“…The resonant frequency slightly decreased as the driving voltage increased from 2.5 to 5 V pp because of air resistance. On the other hand, a further increase in the voltage up to 15 V pp resulted in an increase in the resonant frequency, which might be due to the non-linear hard spring effect of the torsion bars in large shear stress (Filhol et al 2005;Pan et al 2010;Debray et al 2004;Lee et al 2011). The dependence of the optical scanning angle h opt on the negative unipolar driving voltage is plotted in Fig.…”

Section: Scanner Propertiesmentioning

confidence: 99%

“…9, the optical scanning angle h opt proportionally increased with the applied voltage up to 7.5 V pp ; however, this increase in the scanning angle decreased above this voltage. This behavior might be caused by the hard spring effect in which the stiffness of the torsion bars increases with the mirror deflection (Filhol et al 2005;Miyajima et al 2005).…”

Section: Scanner Propertiesmentioning

confidence: 99%

“…In such displays, microelectromechanical systems (MEMS) scanner mirrors are key components, because they determine the specifications of the display such as projection size and resolution (Urey 2002). A two-axis MEMS scanner mirror is scanned both horizontally and vertically by microactuators of electrostatic (Schenk et al 2000(Schenk et al , 2001, electromagnetic (Yalcinkaya et al 2006;Miyajima et al 2001), and piezoelectric (Filhol et al 2005;Tani et al 2006;Yamada and Kuriyama 1998;Asai et al 2003) systems. Among these systems, the piezoelectric microactuator system is advantageous because it enables low voltage actuation, low power consumption, and large operating force (Tani et al 2007;Iseki et al 2010;Pan et al 2010;Koh et al 2010;Kobayashi et al 2005;Yasuda et al 2005).…”

Section: Introductionmentioning

confidence: 99%

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Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

et al. 2012

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We have developed a titanium (Ti)-based piezoelectric microelectromechanical systems scanner driven by a Pb(Zr, Ti)O 3 (PZT) thin film for the development of laser scanning displays. The 2-lm-thick PZT thin film was directly deposited on a 50-lm-thick Ti substrate by radio frequency magnetron sputtering. Prior to PZT deposition, the Ti substrate was microfabricated into the shape of a horizontal scanner by wet etching; therefore, we could fabricate a piezoelectric microactuator without using the photolithography process. We confirmed the growth of the polycrystalline PZT film with perovskite structures on the Ti substrate. We achieved an optical scanning angle of 22°at a resonant frequency of 25.4 kHz using a driving voltage of 20 V pp . These horizontal scanning properties can be applicable for laser displays.

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Section: Scanner Propertiesmentioning

confidence: 99%

Section: Scanner Propertiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

et al. 2012

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“…In general, the tilting angles of micromirrors controlled by electrostatic or electromagnetic actuation are small, and to achieve large angles, it is necessary to either apply a large voltage of over several tens or to operate the devices in a resonant mode [4][5][6][7][8][9]. On the other hand, piezoelectric and thermal expansion actuators are known to produce large forces and large displacements [10,11]. Piezoelectric materials, however, are not routinely supported in the fabrication processes offered by commercial MEMS foundries.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a twisting-type thermal actuator for micromirrors

Kim

Park

2009

J Mech Sci Technol

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This paper reports the design of a novel twisting-type micromirror actuation system. The actuating mechanism for driving the micromirror combines two paralleled bimorph actuators bending in opposite directions for rotational control of the micromirror. Each actuator is structured by gold and silicon dioxide or nickel and silicon nitride thin films with embedded polysilicon line heaters. With a size of only 15µm in width, 1.3µm in thickness, and 100µm in length, two bimorph actuators can result in a vertical displacement of 25µm at 10 volts dc with the span of 120µm, and thus the micromirror can rotate by angles over 20°, which is a significant improvement, compared to conventional tilting-type micromirrors.

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“…Recently, an extensive research has been carried out to integrate these films with MEMS (Filhol et al 2005;Hong et al 2005;Lee et al 2005) and the further improvements are still going on. The fabrication process of MEMS structures (e.g.…”

Section: Introductionmentioning

confidence: 99%

A new approach to integrate PLZT thin films with micro-cantilevers

Singh

Goel

Chandra

2009

Sadhana

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In the present work, we report the preparation of PLZT thin films in pure perovskite phase by RF magnetron sputtering without external substrate heating and their integration with micro-cantilevers. The 'lift-off' process for patterning different layers of a micro-cantilever including PLZT, Pt/Ti and Au/Cr was employed. The basic requirement of lift-off process is that the deposition temperature should not exceed 200 • C otherwise photoresist will burn out. Therefore, one of the aims of the present work was to prepare PLZT film at lower deposition temperatures, which can be subsequently annealed to form pure perovskite phase. This also strongly favours the incorporation of 'lift-off' process for patterning in the complete process flow. As no external substrate heating was required in the deposition of PLZT film, this objective has been successfully accomplished in the present work. The 'lift-off' process has been successfully adopted for patterning the composite layers of PLZT/Pt/Ti and Au/Cr using thick positive photo-resist (STR-1045). Different types of cantilever beams incorporating PLZT films have been successfully fabricated using 'lift-off' process and bulk micromachining technology. The proposed process can be advantageously applied for the fabrication of various MEMS devices.

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Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

Cited by 105 publications

References 2 publications

Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

Design and analysis of a twisting-type thermal actuator for micromirrors

A new approach to integrate PLZT thin films with micro-cantilevers

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