Design and analysis of a twisting-type thermal actuator for micromirrors

Kim, Dong Hyun; Oh, Kyung Su; Park, Seung Ho

doi:10.1007/s12206-009-0113-1

Cited by 7 publications

(2 citation statements)

References 23 publications

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“…It also referred that most of the matter increase in filler volume fraction subjected to expansion and contraction with respect to temperature [1,2,3]. Hence, Thermal expansion is one of the most important a property in the photo-thermal actuator, energy harvesting and MEMS design applications [4,5,6]. Most of the polymer material undergoes thermal expansion due to change in temperature.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Coefficient of Thermal Expansion in Carbon Black Filled PDMS Composite

Hiremath¹,

Rajole²,

Kulkarni³

2020

MSF

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Polymer composites are gaining attention due to their superior thermal properties. Especially carbon black /carbon nanotubes/ graphene filled polymer composites are used in energy harvesting, thermal actuators and MEMS. The coefficient of thermal expansion (CTE) is one of the most important properties in the polymer composite. In the present study, thermal expansion of polydimethylsiloxane (PDMS) matrix is filled with carbon black particle of varied volume fraction is modeled. Two-dimensional finite element (FE) model is computed in order to explain the thermal expansion behavior of the polymer composite and same is carried out for ambient to 70 K temperature. A 2D regular arrangement of circular particle packing model is set up and simulated. The FE model predicts that filler geometry has a little effect on the thermal expansion than the percentage of filler in the composite. Thermal expansion of composite is compared with the theoretical model. It shows that the CTE of composite reduces as the filler percentage increase, also gives good agreement in the both models. Hence, it is found that the addition of carbon black to the polymer composite could make it perform significantly better in thermal expansion.

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Section: Introductionmentioning

confidence: 99%

Analysis of Coefficient of Thermal Expansion in Carbon Black Filled PDMS Composite

Hiremath¹,

Rajole²,

Kulkarni³

2020

MSF

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“…López-Walle et al [27] discussed heat transfer characteristics that are important in improving the performance of thermal actuator. Kim et al [28] 4…”

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confidence: 99%

Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices

Kalaiarasi

Deepa

Angalaeswari

et al. 2021

Journal of Nanomaterials

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This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices. MEMS/NEMS-based thermal actuator is a scaled version of movable device which will produce amplified motion when it is subjected to thermal forces. One of the applications of such thermal micro/nanoactuator is integrating it into micro/nanomotor that makes a thermal actuated micro/nanomotor. In this work, design and simulation of micro/nanothermal rotary actuator are done using MEMS/NEMS technology. Stress, current density, and temperature analysis are done for microthermal rotary actuator. The performance of the device is observed by varying the dimensions and materials such as silicon and polysilicon. Stress analysis is used to calculate the yield strength of the material. Current density is used to calculate the safer limit of the material. Temperature analysis is used to calculate the melting point of the material. Also, in this work, design and simulation of microgear have been done. Micro/nanogears are devices that can be used to improve motion performance. The essential is that it transmits rotational motion to a different axis.

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Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell

Vatan

Hamedi

2020

Microelectronic Engineering

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Design and analysis of a twisting-type thermal actuator for micromirrors

Cited by 7 publications

References 23 publications

Analysis of Coefficient of Thermal Expansion in Carbon Black Filled PDMS Composite

Analysis of Coefficient of Thermal Expansion in Carbon Black Filled PDMS Composite

Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices

Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell

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