Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell

Vatan, Hamed Majidi Fard; Hamedi, M.

doi:10.1016/j.mee.2020.111374

Cited by 19 publications

(10 citation statements)

References 20 publications

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“…ETAs have many configuration designs for generating bending, linear, torsional, and even 3D actuations for a variety of applications. Commonly adopted basic configurations for ETAs (Figure 8) include cantilever beams (e.g., U-shaped hot-and-cold-arm actuators [134][135][136] and bimorph actuators [137][138][139] ), doubly clamped beams (e.g., straight [140,141] and V-shaped [chevron] beams [134,142,143] ), and drum/balloon-like structures (e.g., inflation actuators [144][145][146] ). The beam is usually a strip, fiber/yarn, spring, or a large film/textile, and the skin of the drum/balloon is an elastic film.…”

Section: Working Principle and Device Configurationmentioning

confidence: 99%

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Chen

Tan

Gong

et al. 2021

Advanced Intelligent Systems

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Soft electrical actuators driven by low voltages are promising for interactive human-machine interfaces (iHMI) applications including executing orders to complete various tasks and communicating with humans. The attractive features of low-voltage soft electrical actuators include their good safety, low power consumption, small system size, and nonrigid or deformable characteristics. This review covers three typical classes of electrical actuators, namely, electrochemical, electrothermal, and other electrical (dielectric, electrostatic, ferroelectric, and plasticized gel) actuators according to their mechanism and working potential range. For each kind of actuators, the advantages, working principle, device configuration/design, materials selection, recent progress, and potential applications for iHMI are summarized, with the strategies for enhancing the actuation performance under low voltages being highlighted. Finally, the challenges for those soft actuators and possible solutions are discussed.

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Section: Working Principle and Device Configurationmentioning

confidence: 99%

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Chen

Tan

Gong

et al. 2021

Advanced Intelligent Systems

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“…With the same applying voltage and the similar cover size, the V-shaped achieves a larger output force and displacement than U-and Z-shaped actuators, respectively (Li et al, 2015;Zhang et al, 2021;Shen and Chen, 2013). Therefore, the V-shaped electrothermal microactuator (VEM) is widely applied in various micromachines/devices such as micro gripper (Andersen et al, 2008;Majidi Fard and Hamedi, 2020;Si et al, 2021), nanomaterial testing device (Espinosa et al, 2007), safe thermal device (Hu et al, 2017), linear motor (Maloney et al, 2004) and rotary micromotors (Shen and Chen, 2013;Park et al, 2001). Currently, many heat transfer models of VEM have been proposed and developed to obtain more accurate calculation of the temperature distribution on the V-beam.…”

Section: Introductionmentioning

confidence: 99%

Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process

Nam

Pham²,

Hoang³

2023

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Purpose This paper aims to propose a method to reduce the resistance of silicon-based V-shaped electrothermal microactuator (VEM) by applying a surface sputtering process. Design/methodology/approach Four VEM’s samples have been fabricated using traditional silicon on insulator (SOI)-Micro-electro-mechanical System (MEMS) technology, three of them are coated with a thin layer of platinum on the top surface by sputtering technique with different sputtered times and the other is original. The displacements of the VEM are calculated and simulated to evaluate the advantages of sputtering method. Findings The measured results show that the average resistance of the sputtered structures is approximately 1.16, 1.55 and 2.4 times lower than the non-sputtering sample corresponding to the sputtering time of 1.5, 3 and 6 min. Simulation results confirmed that the maximum displacement of the sputtered VEM is almost 1.45 times larger than non-sputtering one in the range of voltage from 8 to 20 V. The experimental displacements are also measured to validate the better performance of the sputtered samples. Originality/value The experimental results demonstrated the better displacement of the VEM structure after using the platinum sputtering process. The improvement can be considered and applied for enhancing displacement as well as decreasing the driving voltage of the other electrothermal microactuators like U- or Z-shaped structures while combining with the low-cost SOI-MEMS micromachining technology.

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“…Furthermore, the absence of standardi-zed procedures and interfaces makes planning much more difficult. The assembly of micro components, in addition to the problems of planning, also has the problems of technology that must ensure the required high precision [3]- [5], as well as the possibility of automating the process with minimal losses of time and materials [6]. In order to maintain the quality of the process, it is necessary to adapt the methods of quality assurance to the process, and instead of the classic final quality check, it is necessary to prevent the occurrence of quality deviation by analysing the various data supplied by production process and customer feedback [7].…”

Section: Introductionmentioning

confidence: 99%

"Improve" and "Control" tools in assembly of micro components: A case study

Janev,

Spasojević-Brkić,

Misita

et al. 2023

Tehnika

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The process of assembling micro components requires careful planning where precise and reliable data collecting is necessary due to a short production cycle time. After determining the shortages of the current data monitoring system, in this paper, by using the "Improve" and "Control" phases of DMAIC cycle, the development and later testing of a new tool for automatic capture and analysis of data obtained from the machine was done. SWOT analysis was used to establish the production site's and current manufacturing execution system strengths and weaknesses, opportunities and threats, which were then utilized to create the newly developed solution accurate and feasible. A tool calibration data was obtained on 9 machines in automotive company's micro component assembly unit. To confirm the accuracy of the data, a RunAtRate test was done on the machines, and by using hypothesis testing, the initial reliability of the new solution was determined. Further testing and comparison revealed that the newly proposed tool recorded 73-80% greater downtime and 40-50% more defective parts than the previously installed system. Accordingly, the usefulness of the proposed Lean Six SIGMA tool is confirmed, and for periodic accuracy checks and further improvement, it is necessary to apply the PDCA cycle.

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Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell

Cited by 19 publications

References 20 publications

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process

"Improve" and "Control" tools in assembly of micro components: A case study

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