Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

Matsushita, Setsuro; Kanno, Isaku; Adachi, K.; Yokokawa, Ryuji; Kotera, Hidetoshi

doi:10.1007/s00542-012-1462-8

Cited by 16 publications

(5 citation statements)

References 27 publications

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“…Park et al introduced a stainless steel based piezoelectric scanner operating at 28.24 kHz [88]. Moreover, Matsushita et al developed a 25.4 kHz PZT film actuated scanner on a Ti substrate to simplify the fabrication process of piezoelectric thin film MEMS [91]. Both these metal-based scanners showed good control of dynamic deformation.…”

Section: Piezoelectrically Actuated Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

393

175

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Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

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Section: Piezoelectrically Actuated Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

393

175

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“…It should be noted that some recent studies have reported new types of piezoelectric micro-electromechanical systems such as piezoelectric micro-mirrors actuated by Nb-doped PZT thin films [11,12] and metal-based scanner [13] with flexible piezoelectric micro/nano-actuators [14,15], where various advanced processing methods, such as ultrasonic processing, slow machining processing and 3D printing, have been successfully applied to the fabrication of micro/nanopositioning stages with more DOF and flexibility [16]. For example, a two-axis optical scanner based on the stainlesssteel substrate and piezoelectric thin sheets have been developed and fabricated as an alternative to designing microscanners with a larger mirror size and scanning angle at the middle frequency range [17].…”

Section: Introductionmentioning

confidence: 99%

Dynamic modeling and validation of a novel 3-DOF flexible thin sheet nano-manipulator with piezoelectric material bonded

Chen

Yan

2020

Smart Mater. Struct.

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In this paper, we investigate a 3-DOF (degree-of-freedom) piezoelectric nano-manipulator designed with flexible flexures and unimorph piezoelectric thin sheet actuators, allowing for high-precision motions with a compact size and fast dynamics response. Based on the Lagrange's equations, the dynamic model of the proposed motion system is established by equivalent approximations of the distributed parameter dynamics and the piezoelectricmechanical coupling effect. Comprehensive simulations and experiments are also conducted on the flexible piezoelectric nano-manipulator with piezoelectric thin sheets (PZT-5A) under various electric fields, where the proposed model agrees well with simulations and experiments. The proposed modeling approach provides the basis for the model-based feedback controller design of such systems.

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“…A MEMS mirror has been widely used for laser=light scanning systems such as optical switches, 1,2) bar code scanners, 3) projection displays, [4][5][6] endoscopes, 7) confocal laser scanning, 8,9) and optical coherent tomography. [10][11][12] Recently, in addition to one-and two-dimensional (1D=2D) MEMS mirrors, a 3D MEMS mirror has been developed for application in an optical phase modulation or a 3D optical projection=imaging.…”

Section: Introductionmentioning

confidence: 99%

Operation of three-dimensional MEMS mirror by single superposed driving signal

Nagasawa¹,

Oguchi²,

Iwase³

2017

Jpn. J. Appl. Phys.

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We have realized a three-dimensional (3D) operation of a microelectromechanical systems (MEMS) mirror with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3D MEMS mirror with a single pair of beams having three resonant modes (x- and y-axis rotational modes and a z-axis vertical mode). We demonstrated the 3D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the x- and y-axis rotational angles and z-axis vertical displacement are proportional to the voltage amplitudes of each resonant frequency in the superposed signal, and the proportionality constants for each angle and deformation are approximately determined as 0.10°/V, 0.10°/V, and 70 nm/V, respectively. This result indicates that the mechanical amplitude of each mode is easy to control by the signal amplitude of each resonant frequency in the superposed signal.

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Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

Cited by 16 publications

References 27 publications

MEMS Laser Scanners: A Review

MEMS Laser Scanners: A Review

Dynamic modeling and validation of a novel 3-DOF flexible thin sheet nano-manipulator with piezoelectric material bonded

Operation of three-dimensional MEMS mirror by single superposed driving signal

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