Abstract:Abstract:The resolution of helium ion scanning microscopes working in the secondary electron emission mode is theoretically estimated in the energy interval of E = 0.3-100 keV. The corresponding probe diameter improves with energy from 1.0 to 0.2 nm. A theoretical probe diameter of 0.25 nm can be obtained by use of a standard three-electrode objective lens of electrostatic microscopes. The most important ion-optical element of this device is the supertip ion source. The existing devices, however, need calibrat… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.