2011
DOI: 10.1109/ted.2010.2095502
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Resistance and Threshold Switching Voltage Drift Behavior in Phase-Change Memory and Their Temperature Dependence at Microsecond Time Scales Studied Using a Micro-Thermal Stage

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Cited by 63 publications
(64 citation statements)
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“…In contrast to many other works [16,25,28,39,40], the resistance is measured directly during annealing in all the experiments performed within this work.…”
Section: Resistance Drift In Amorphous As-deposited Phase Change Filmsmentioning
confidence: 99%
“…In contrast to many other works [16,25,28,39,40], the resistance is measured directly during annealing in all the experiments performed within this work.…”
Section: Resistance Drift In Amorphous As-deposited Phase Change Filmsmentioning
confidence: 99%
“…The inset 3D figure shows the MTS heater overlapped region over narrow phase change material programming region. After [12].…”
Section: Phase Change Memorymentioning
confidence: 99%
“…Fig. 1 shows the lateral PCM cell int platinum micro-thermal stage [11] [12]. By generating Joule heat in the Pt heater, th the programming region of the PCM cell is c the heater is located only a 1μm away from region and also due to its smaller dimensions, constant of this structure is ~1μs extending t capability by up to 6 orders of magnitude conventional thermal stages.…”
Section: A Understanding Resistance Drift and Thermal Disturbancementioning
confidence: 99%
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“…18 However, according to other studies, 10,15 the resistance drift is related to the stress relaxation, leaving this as an unresolved issue. As the PCM dimension becomes smaller (such as 20∼40 nm thin film, 16,19,20 ∼40 nm NW formation 9,15,21,22 or even under 10 nm size 23 ), the PCM region would be sufficiently small enough to undergo complete phase transition, and thus the external effect from ELM is more critical than in the case of conventional large dimension PCRAM devices reported to date. Therefore, studies on stress relaxation correlated to ELM are needed.…”
mentioning
confidence: 99%