2009
DOI: 10.1016/j.tsf.2009.02.141
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Residual stresses and Raman shift relation in anatase TiO2 thin film

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Cited by 113 publications
(61 citation statements)
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“…To meet this aim, the samples were fully characterized using Raman spectroscopy. From the Raman spectrum of TiO 2 many different information can be obtained: titanium oxide phase fraction [22,23], crystallinity, crystallite size [24] and residual stresses [25] down to a minimum coating thickness of about 100 to 250 nm, depending on the substrate chemistry [26]. Crystallographic alterations caused by small amounts of dopants into the TiO 2 structure can also be easily discriminated by the appearance of their associated Raman bands [27], thus making Raman spectroscopy adequate for the characterization of functionalized titanium oxide layers [28][29][30].…”
Section: Accepted Manuscriptmentioning
confidence: 99%
“…To meet this aim, the samples were fully characterized using Raman spectroscopy. From the Raman spectrum of TiO 2 many different information can be obtained: titanium oxide phase fraction [22,23], crystallinity, crystallite size [24] and residual stresses [25] down to a minimum coating thickness of about 100 to 250 nm, depending on the substrate chemistry [26]. Crystallographic alterations caused by small amounts of dopants into the TiO 2 structure can also be easily discriminated by the appearance of their associated Raman bands [27], thus making Raman spectroscopy adequate for the characterization of functionalized titanium oxide layers [28][29][30].…”
Section: Accepted Manuscriptmentioning
confidence: 99%
“…Rutile belongs to the P24/mnm space group (D 4h symmetry) [57] and its Raman active modes occur at ca. 143 cm −1 (B 1g ), 447 cm −1 (E g ), 612 cm −1 (A 1g ) and 826 cm −1 [58][59][60][61][62]. Also a peak at ca.…”
Section: Resultsmentioning
confidence: 95%
“…Figure 5 shows the Raman spectra of the TiO 2 films prepared at different sputtering pressures. Five characteristic anatase Raman modes at 144,199,399,516, and 640 cm -1 , which are assigned to the E g phononic mode represented by ν 6 , the E g phononic mode represented by ν 5 , the B 1g phononic mode represented by ν 4 , the B 1g phononic mode plus the A 1g phononic mode represented by ν 3 + ν 2 , and the E g phononic mode represented by ν 1 , respectively (Ohsaka et al, 1978;Karunagaran et al, 2003;Alhomoudi and Newaz, 2009), have been observed for all the samples. No other phases, such as rutile and brookite phases, have been observed, which are in agreement with XRD's results as shown in Figure 3.…”
Section: Resultsmentioning
confidence: 99%