Investigation of structural, optical and micro-mechanical properties of (NdyTi1−y)Ox thin films deposited by magnetron sputtering

Mazur, М.; Howind, Torsten; Gibson, D. R.; Kaczmarek, Danuta; Song, Shingeng; Wojcieszak, Damian; Zhu, Wenzhong; Mazur, Piotr; Domaradzki, J.; Placido, Frank

doi:10.1016/j.matdes.2015.07.005

Cited by 14 publications

(9 citation statements)

References 75 publications

(81 reference statements)

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“…Similar behavior has been already observed for even small addition of ca. 10 at.% of Nd2O3 to TiO2 thin films [33]. In the case of TiO2, XRD measurements revealed a trace amount of fine crystallites related to the rutile phase.…”

Section: Resultsmentioning

confidence: 92%

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Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings

et al. 2016

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Abstract:In this paper the influence of material composition on the structural, surface and optical properties of HfO 2 -TiO 2 mixed oxide coatings was investigated and discussed. Five sets of thin films were deposited using reactive magnetron sputtering: HfO 2 , TiO 2 and three sets of mixed HfO 2 -TiO 2 coatings with various titanium content. The change in the material composition had a significant influence on the structural, surface and optical properties. All of the deposited coatings, except for (Hf 0.55 Ti 0.45 )O x , were nanocrystalline with crystallites ranging from 6.7 nm to 10.8 nm in size. Scanning electron microscopy measurements revealed that surface of nanocrystalline thin films consisted of grains with different shapes and sizes. Based on optical transmission measurements, it was shown that thin films with higher titanium content were characterized by a higher cut-off wavelength, refractive index and lower optical band gap energy. The porosity and packing density were also determined.

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Section: Resultsmentioning

confidence: 92%

“…In turn, the packing density (PD) of a film is defined as the ratio of the average film density (ρf) and the bulk density (ρb) according to the equation [33,40,41]:…”

Section: Resultsmentioning

confidence: 99%

Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings

et al. 2016

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“…The mechanical properties in the traditional testing are calculated from the depth of the penetrated material at the maximum indentation load of each loading cycle (Figure 9a), while in the CSM method, the hardness and elastic modulus can be obtained as a function of indentation depth [35] (Figure 9b). In our previous work [56], it was mentioned that unlike the quasi-static traditional indentation experiments, the CSM method is considered to be dynamic testing, which may matter in the case of time-dependent material behaviour. The CSM method gives the possibility to obtain mechanical properties (i.e., hardness and Young's elastic modulus values) as a function of the indentation depth.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

“…In our previous work [56], it was mentioned that unlike the quasi-static traditional indentation experiments, the CSM method is considered to be dynamic testing, which may matter in the case of time-dependent material behaviour. The CSM method gives the possibility to obtain mechanical properties (i.e., hardness and Young's elastic modulus values) as a function of the indentation depth.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

Characterization of HfO2 Optical Coatings Deposited by MF Magnetron Sputtering

et al. 2019

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The aim of this work is to determine the influence of medium frequency magnetron sputtering powers on the various properties of hafnium dioxide (HfO2) thin films. Microstructure observations show that an increase in the sputtering power has a significant influence on HfO2 films’ microstructure. As-deposited hafnia thin films exhibit nanocrystalline structure with a monoclinic phase, however thr rise of the sputtering power results in an increase of crystallite sizes. Atomic force microscopy investigations show that the surface of the deposited films is smooth, crack-free, and composed of visible grains. The surface roughness and the value of the water contact angle increase with the increase of the sputtering power. Measurements of the optical properties show that HfO2 coatings are transparent in the visible wavelength range. A higher sputtering power causes a decrease of an average transmittance level and a simultaneous increase of the real part of the refractive index. Nanoindentation measurements reveal that the thin film hardness and Young’s elastic modulus increase with an increase in the sputtering power. Moreover, the results of plasticity index H/E and plastic resistance parameter H3/E2 are discussed. Based on the obtained results, a correlation between the sputtering power and the structural, surface, and optical properties, as well as the hardness and Young’s elastic modulus, were determined.

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“…Depending on the processing conditions, materials can be obtained with specific mechanical, magnetic and optical properties, microstructures, and surface textures. For example, Gan et al [21] investigated the structural properties of Cu2O-epitaxial films, Sun et al [22] determined the optical and electrical performance of thermochromic V2O3 thin films, Cao and Zhou [23,24] determined the magnetic properties of CoZrNb and FeNiCr films, Mirzaee et al [25] examined the surface textures of ZnO films, Rode et al [26] studied effects of deposition rate on surface roughness of Al films, Zenkin et al [27] investigated the thickness dependence of wettability and surface properties of HfO2 thin films, Han et al [28] explored the composition and structure of TiHxHe films, Gudla et al [29] investigated the microstructure evolution of AlZr and AlZrSi coatings during heat treatment processes, Kobata and Miura [30] examined the mechanical and thermal properties of TiCuZrNiHfSi thin films, Pshyk et al [31] analyzed the structural, morphological and tribo-mechanical properties of AlNTiB2TiSi2 coatings, and Mazur et al [32] investigated structural, optical, and micro-mechanical properties of (NdyTi1−y)Ox thin films produced by magnetron sputtering. Moreover, effects of the magnetron sputtering processing on the surface roughness of ultra-thin films are investigated in different studies [33][34][35][36][37].…”

Section: Introductionmentioning

confidence: 99%

Effects of processing force on performance of nano-resonators produced by magnetron sputtering deposition

Shaat

2018

Physica E: Low-dimensional Systems and Nanostructures

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Magnetron sputtering is a perfect technique for processing nanomaterials for engineering and medical applications. A material can be processed with specific mechanical properties, microstructure, and surface texture by controlling the parameters of magnetron sputtering. Therefore, studies should be conducted on investigating the processing conditions on the performance of nanomaterials processed by magnetron sputtering.In this study, effects of the processing force on performance of micro/nano-resonators produced by magnetron sputtering are revealed. The processing force is defined as the ratio of the sputtering power-tothe substrates traveling velocity. By comparing the substrate's traveling velocity to the deposition rate of the sputtered particles, relations are derived for the thickness and surface texture evolutions with the processing force. The coefficients of these relations are experimentally determined for mechanical resonators made of FeNiCr alloy. Then, the variations of the natural frequencies of these resonators with the processing force of magnetron sputtering and the deposition rate of the sputtered particles are depicted.It is demonstrated that special considerations should be given for the effects of the processing conditions when design mechanical resonators produced by magnetron sputtering.

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Investigation of structural, optical and micro-mechanical properties of (NdyTi1−y)Ox thin films deposited by magnetron sputtering

Cited by 14 publications

References 75 publications

Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings

Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings

Characterization of HfO2 Optical Coatings Deposited by MF Magnetron Sputtering

Effects of processing force on performance of nano-resonators produced by magnetron sputtering deposition

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