Research on Character of Integrated Quartz Crystal Resonators

Abstract

The force sensitive characteristic of integrated quartz crystal resonator assembled on one quartz crystal substrate with a certain radial direction force are studied, and it is also studied that the force sensitive characteristic of output frequency which is the mixing frequency by resonant frequency corresponded to the resonators in the different position of the same quartz crystal wafer outputted in difference frequency way. The research result shows the force sensitive characteristic of AT-cut integrated three-electrode quartz crystal resonator outputted in difference frequency way is 1.3 times of that of the traditional single-electrode resonator. The force sensitive characteristic of the integrated four-electrode resonator is a little bit smaller, but two sets of output can be obtained at the same time. The frequency stability of all integrated quartz resonator can get to the magnitude of 10-10 and relative frequency variation is about ±5ppm in the range of -50°C to 60°C.

High‐sensitivity QCM with multielectrode piezoelectric quartz crystal design

“…But how to improve the precision maximally is still need to be studied. Our group insisted on the research of multi‐electrode QCM design over last ten years . The three‐electrode and four‐electrode had been designed since 2012, but it is very difficult to improve it to six‐electrode due to higher technological requirements and higher testing environment requirements.…”