The force sensitive characteristic of integrated quartz crystal resonator assembled on one quartz crystal substrate with a certain radial direction force are studied, and it is also studied that the force sensitive characteristic of output frequency which is the mixing frequency by resonant frequency corresponded to the resonators in the different position of the same quartz crystal wafer outputted in difference frequency way. The research result shows the force sensitive characteristic of AT-cut integrated three-electrode quartz crystal resonator outputted in difference frequency way is 1.3 times of that of the traditional single-electrode resonator. The force sensitive characteristic of the integrated four-electrode resonator is a little bit smaller, but two sets of output can be obtained at the same time. The frequency stability of all integrated quartz resonator can get to the magnitude of 10-10 and relative frequency variation is about ±5ppm in the range of -50°C to 60°C.
By analysing the wafer, the electrodes, etc. according to the energy limit theory and the ANSYS finite element simulation, in this paper the author has designed the integrated quartz crystal resonator and oscillator circuit, and has carried on the experimental comparison on the stability of the integrated resonators, which have different structure, different electrode material and thickness. The experimental results show that the frequency stability of quartz crystal resonator is not only related with the electrode material and thickness, but also related with the structure. Under the same condition, resonator of asymmetric structure has better frequency stability, and the stability of Au-electrode was better than others, and its magnitude could reach 10 10. With the increase of the electrode thickness, the resonator oscillator stability will be improved.
Based on the analysis of stress distribution in the medium of semi-infinite anisotropic thin medium plates with centralized forces, in the method of protracting and adding additional stress, the relation of relative frequency variation and adding force azimuth and strength of the plates with the diameter centralized forces can be gained. And it is compared with relative frequency variation of resonation with central electrode. Meanwhile by using finite element method to analyze stress variation in different places when the quartz plate is with the diameter centralized forces, and the frequency variation characteristic of resonator in different places is also be measured in the actual evaporated electrode way.
Combining the energy limit theory and the ANSYS finite element simulation analysis, this paper has designed the new integrated quartz crystal resonator and has used oscillator circuits to carry on the experimental comparison on its temperature-frequency characteristic in high-low temperature chamber. The experimental results show that the curve of its temperature-frequency characteristic is cubic in the coordinate system, which is basically consistent with that of the single electrode resonator. The frequency change of each resonator on the same substrate is basically the same when they are in the same circumstance and stimulation. According these similarities, this paper can implement differential processing on output frequencies of different resonators on the same substrate, which can effectively restrain the influence that temperature imposes on frequency.
The sensitive mechanism of micro airstream gyroscope was explained by calculating the distributing of stream field in the sense organ. According to the real size of micro airstream gyro-scope, ANSYS-FLOTRAN CFD was used to create models and work out the gas flow field and distributing in the two-dimensional chamber with different angular velocities. The results show that while the gyroscope in a static state the gas velocities at both hot-wires are equal as well as the current, and the output voltage is zero. On inputting an angular rate the gas velocities differ and a voltage signal proportional to the input angular rate is achieved.
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