Replication techniques for ceramic microcomponents with high aspect ratios

Bauer, Werner; Knitter, Regina; Emde, A.; Bartelt, G.; Göhring, D.; Hansjosten, E.

doi:10.1007/s00542-002-0200-z

Cited by 41 publications

(21 citation statements)

References 12 publications

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“…To facilitate demolding, different strategies were investigated to improve the yield of the lMIM process. Reducing the surface roughness of the sidewall of the microcavity is one possibility, as this reduces the friction at the sidewall and molded microstructure interface during demolding (Bauer et al 2002). Another strategy is the enhancement of the mechanical strength of the molded microstructure.…”

Section: Introductionmentioning

confidence: 99%

Analysis of demolding in micro metal injection molding

Loh

Tor

et al. 2006

Microsyst Technol

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In this paper micro metal injection molding (lMIM) is being studied to produce 316L stainless steel microstructures. Experimental work showed that demolding failure was a serious hindrance to the success of lMIM as a suitable technology to produce small microstructures. Thus, a theoretical analysis of microstructure demolding in lMIM is needed in order to understand the demolding behavior theoretically and how to avoid demolding failure in lMIM. In this paper, theoretical analysis of the demolding of 24·24 (totally 576) microstructures was conducted with the help of Abaqus finite element analysis software. The analysis was involved in two factors that possibly lead to demolding failure: one is the shear stress during ejection of the microstructure due to contact pressure between the microstructure and the microcavity, the other is thermally-induced stress due to cooling of the microstructure. The analysis shows that the following factors have significant influence on the demolding: aspect ratios of the microstructure, the coefficient of friction between the microstructure and the microcavity, demolding temperature and holding pressure. And the microstructure that is farther away from the centerline of the round part with microstructures undergoes higher stress and more easily subject to breakage. The moment when the microstructure is the most possibly subject to breakage during demolding is always the onset of ejection.

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Section: Introductionmentioning

confidence: 99%

Analysis of demolding in micro metal injection molding

Loh

Tor

et al. 2006

Microsyst Technol

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“…When applying master models of high surfa ce quality, fabricated, for example, by mechanical micromachining, aspect ratios of more than 10 were obtained [38]. U sing R P models, the inherent surface roughness of the vertical walls causes considerable friction forces during demoulding.…”

Section: Resultsmentioning

confidence: 99%

Microfabrication of ceramics by rapid prototyping process chains

Knitter

Bauer

Göhring

2003

Proceedings of the Institution of Mechanical Engineers, Part C:

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M ost shaping processes for ceramics are based on a powder technological moulding process using a negative mould and subsequent thermal compaction. Especially for prototypes and small-lot series of microcomponents, the outlay for moulds is the major costing factor. Therefore the use of rapid prototyping (R P) processes can decisively reduce the costs and time in product development of ceramic microcomponents. By combining the high resolution of, for example, stereolithography as an inexpensive and fast supply for master models with the high exibility of lowpressure injection moulding, a rapid prototyping process chain (R PPC) has been established for the fabrication of micropatterned ceramic components as functional models or pre-production lots. This R PPC proved to have a very high moulding precision and accuracy in the submillimetre range, but also enables the fabrication of components with outer dimensions of several centimetres. D ifferent R P techniques were investigated with regard to their suitability to be used as master models in the replication chain. The quality of the master models turned out to be of decisive signi cance for the quality and reproducibility of the ceramic mouldings.

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“…[68,69] Recently, the technology was further developed using low-pressure injection molding and centrifugal casting. [70,71] Ruzzu et al combined ceramic and metallic LIGA structures for advanced electronic packaging applications. [72] Feiertag et al made use of an unique feature of X-ray lithography, the possibility to expose from different angles.…”

Section: Lithography-based Processesmentioning

confidence: 98%

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Heule¹,

Vuillemin

Gauckler

2003

Advanced Materials

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Processing techniques are reviewed that allow the introduction of ceramic components made from powders into microelectromechanical systems (MEMS). Ceramics have several advantages over other materials also in microsystems, e.g., heat resistance, hardness, corrosion resistivity, or functional properties. The range of available materials in microfabrication technology is being increased beyond those deposited by thin‐film technology. Top–down approaches like mechanical and laser‐based direct writing processes, ink‐jet printing, microextrusion, and lithography‐based methods are presented. They are complemented by some more fundamental work in the field of bottom–up synthesis of micro‐ and nanoscaled ceramic materials.

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Replication techniques for ceramic microcomponents with high aspect ratios

Cited by 41 publications

References 12 publications

Analysis of demolding in micro metal injection molding

Analysis of demolding in micro metal injection molding

Microfabrication of ceramics by rapid prototyping process chains

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

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