Removal characteristics and performance of brick-shape permanent magnet–assisted magnetorheological lapping

Wang, Yongqiang; Xu, Zhiqiang; Yin, Shu

doi:10.1007/s00170-019-04531-2

Cited by 6 publications

(1 citation statement)

References 35 publications

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“…Lapping using microabrasives improves the flatness of the substrate being machined and reduces the thickness of the subsurface damaged layer in the manufacturing of single-crystal substrates such as sapphire, SiC, and GaN, which in turn reduces the post processing time of chemical mechanical polishing (CMP) [ 1 , 2 , 3 , 4 ]. Microdiamonds are normally used as the abrasive particles, and metal platens made of cast iron, copper, or tin are used as the lapping platen [ 5 , 6 , 7 , 8 ].…”

Section: Introductionmentioning

confidence: 99%

Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping

et al. 2020

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Microabrasive-based lapping is widely used in the manufacturing of single-crystal substrates such as sapphire, SiC, and GaN. Although many studies have been conducted to improve the lapping process characteristics, most of them focused on process conditions or consumables. In this study, the effect of the lapping platen groove density on the lapping characteristics was studied using a sapphire substrate. Groove density was defined as the ratio of groove width to groove pitch, and the displacement of the lapping head was measured to calculate the oil film thickness. It was confirmed that, for groove densities below 0.30, hydroplaning occurs when the oil film thickness increases. When the oil film thickness is larger than the abrasive particle size, the material removal rate is low because the abrasive does not participate in the lapping process. When the oil film was developed, the experimental results showed a high surface roughness and poor flatness of the substrate, as only large abrasive particles participated in the lapping process. Therefore, to improve the lapping characteristics, it is important to reduce the groove density by reducing the groove pitch, which prevents the development of the oil film.

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Section: Introductionmentioning

confidence: 99%

Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping

et al. 2020

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Advance Chemical Mechanical Polishing Technique for Gallium Nitride Substrate

Zhao,

Wang,

Liu

et al. 2024

Adv Materials Inter

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As the representative of substrate material, gallium nitride (GaN) has excellent mechanical properties and high thermal stability. Achieving high surface flatness is critical for subsequent epitaxial growth and device fabrication processes. Chemical mechanical polishing (CMP) technique of GaN is commonly one of the most effective ways to achieve atomically smooth surfaces. However, the current process is difficult to meet the needs of industrial development due to the characteristics of low material removal rate. Assisted enhanced CMP technique is deemed to possess significant potential due to its improved processing efficiency and surface topography quality. Herein, a variety of auxiliary enhanced CMP systems are designed and studied. In this review, recent advances both in conventional and assisted enhanced CMP of GaN are comprehensive presented, with a focus on their potential applications in various fields. The mechanism and design strategy of the process are discussed and summarized. The key issues in machining atomically flattened surface are outlined, and future strategies for sustainable development are also proposed. This review provides a novel perspective on GaN processing and offers more inspiration for future research to realize its development and commercial application.

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Material removal mechanism of non-resonant vibration-assisted magnetorheological finishing of silicon carbide ceramics

Kang

Yan

Lin

et al. 2023

International Journal of Mechanical Sciences

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Removal characteristics and performance of brick-shape permanent magnet–assisted magnetorheological lapping

Cited by 6 publications

References 35 publications

Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping

Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping

Advance Chemical Mechanical Polishing Technique for Gallium Nitride Substrate

Material removal mechanism of non-resonant vibration-assisted magnetorheological finishing of silicon carbide ceramics

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