2007 IEEE Custom Integrated Circuits Conference 2007
DOI: 10.1109/cicc.2007.4405763
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Reliability Trends with Advanced CMOS Scaling and The Implications for Design

Abstract: Scaling (for enhanced performance, increased functionality and cost reduction reasons) has pushed existing CMOS materials much closer to their intrinsic reliability limits. This will require that designers pay very close attention to both front-end-of-line (FEOL) and back-end-of-line (BEOL) reliability issues. As for the FEOL reliability issues, hyperthin gate oxide leakage, time-dependent dielectric breakdown (TDDB), and negative-bias temperature instability (NBTI) are near the top the list. In the case of hy… Show more

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Cited by 45 publications
(20 citation statements)
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“…The vias in the interconnect stack have the highest reliability concerns [23], [24], [25], [26], [27] and incorporating regularity at the lower levels of abstraction shows clear benefits with the UR implementations using the lowest number of vias as is evident from Fig. 2b.…”
Section: A Raw Implementation Metricsmentioning
confidence: 95%
“…The vias in the interconnect stack have the highest reliability concerns [23], [24], [25], [26], [27] and incorporating regularity at the lower levels of abstraction shows clear benefits with the UR implementations using the lowest number of vias as is evident from Fig. 2b.…”
Section: A Raw Implementation Metricsmentioning
confidence: 95%
“…However, for the finest lines at least, it looks like the direction will be towards sharply higher line resistances as barrier layers and finite size effects become significant [12,13]. Dielectric constants are not likely to go much lower and may actually have to go higher to avoid problems with Time-Dependent Dielectric Breakdown (TDDB) [14,15]. This is also a result of non-scaling behavior, and the high electric fields caused by non-scaled voltages applied across shrinking feature dimensions.…”
Section: Figure 1 Supply Voltage Scaling Breakdownmentioning
confidence: 99%
“…Various reliability issues have worsened to unacceptable levels due to rising power and current densities which increase temperature levels and gradients. Hence, this trend further accelerates the negative impact on long term wear-out effects [1] [2] that are introduced briefly in the following.…”
Section: Introductionmentioning
confidence: 98%