2013
DOI: 10.1007/s11666-013-0031-8
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Relationship Between Impact Velocity of Al2O3 Particles and Deposition Efficiency in Aerosol Deposition Method

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Cited by 38 publications
(22 citation statements)
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“…Naoe et al showed that, for Al 2 O 3 particles, the deposition efficiency and film‐substrate interface depends on the particle impact velocity. In addition, by using electron energy‐loss spectroscopy and previously reported first principles calculation, the authors inferred the existence of ionic and covalent bonding at the interface of Al 2 O 3 ceramic films on Cu substrates.…”
Section: Introductionmentioning
confidence: 99%
“…Naoe et al showed that, for Al 2 O 3 particles, the deposition efficiency and film‐substrate interface depends on the particle impact velocity. In addition, by using electron energy‐loss spectroscopy and previously reported first principles calculation, the authors inferred the existence of ionic and covalent bonding at the interface of Al 2 O 3 ceramic films on Cu substrates.…”
Section: Introductionmentioning
confidence: 99%
“…The method has received additional attention and undergone development because it is an attractive method of forming dense ceramic coatings 2,3) . Many ceramic powders, such as ZrO 2 4-6) , α-Al 2 O 3 2, 3,[7][8][9] , Pb(Zr 52 ,Ti 48 ) O 3 3,10) , Ni-Zn-Fe 3 O 4 3) , Li 4 Ti 5 O 12 11) , AlN 3) , MgB…”
Section: Introductionmentioning
confidence: 99%
“…19) 하지만 VKS 공 정과 같이 크기와 밀도가 작은 세라믹 입자를 사용하는 경우, 가스 흐름에 의해 입자의 유동이 민감하기 때문 에 SCM 실험법으로는 유동장 내의 입자의 거동을 예 측하기 어렵다. 반대로 가스 및 입자 유동 해석 프로그 램인 computational fluid dynamics(이하 CFD) 전산모사 를 사용한 경우, [20][21][22] 25) Fig. 9(a)를 통 해 가스 유량에 따라 관 내의 가스 밀도가 변화하는 것 을 알 수 있다.…”
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