Reduction of Liquid Bridge Force for 3D Microstructure Measurements

Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao; Fukuda, Mitsuyoshi

doi:10.3390/app6050153

Cited by 12 publications

(8 citation statements)

References 16 publications

(8 reference statements)

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“…Force between the charged stylus tip and the measured surface is called electrostatic force [22]. When the charged stylus is brought close to the charged surface to be measured and the distance between the stylus tip and the measured surface becomes 10 µm or below while using the stylus shaft and tips with diameters of 20 and 35 µm, the stylus tip is attracted to the measured surface by the electrostatic force and may stick to it [21]. The adsorption distance decreases as the diameter of the stylus shaft increases.…”

Section: Effect Of Surface Forcementioning

confidence: 99%

“…However, when measuring 3-dimensional shapes such as free-form surfaces, there is a problem that errors occur depending on the contact direction. Therefore, we have developed a system which enables measurements to be taken in a vacuum vessel, reducing the effects of adhesion due to surface forces by about 60% [21]. However, the size of the space inside the vacuum vessel is limited, making it impossible to measure large objects.…”

Section: Introductionmentioning

confidence: 99%

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Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

et al. 2023

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The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.

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Section: Effect Of Surface Forcementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

et al. 2023

Self Cite

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“…The surface forces become increasingly more prominent than gravity when the size of the microprobe tip is less than a few millimeters. Surface forces are several orders of magnitude greater than gravity at scales of several tens to several hundred micrometers in diameter [31][32][33][34]. Therefore, surface forces attract the probe tip to the surface when the probe tip is close to the measurement surface [35].…”

Section: Issues For Microprobe Systemmentioning

confidence: 99%

“…Therefore, surface forces attract the probe tip to the surface when the probe tip is close to the measurement surface [35]. Although surface forces can be reduced via chemical treatment, surface texture, and environmental control [32,33], it is difficult to ignore the effect of these surface forces in micro-CMM probes. Surface forces significantly degrade measurement repeatability and reproducibility.…”

Section: Issues For Microprobe Systemmentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

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“…The interfacial adhesive force caused by the resultant force and the contact At nanoscale, the interaction between the stylus microsphere tip and the sample surface is a complex process. Different interfacial forces, such as capillary, van der Waals, electrostatic, interfacial friction, and hydrogen bonding forces, influence the interaction [29]. In our previous study [30], we established a simple mass-spring contact mechanical model between the microsphere of the probe and the sample surface in three directions, and the microforces mentioned were only analyzed qualitatively and schematically.…”

Section: Mechanical Modelsmentioning

confidence: 99%

A Three-Dimensional Resonant Triggering Probe for Micro-CMM

Huang

Chen

et al. 2017

Applied Sciences

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To achieve true 3D nano-measurement with sub-nanometer resolution and very low touch force through a micro/nano coordinate measuring machine, a new 3D resonant trigger probe based on a quartz tuning fork is proposed. In this trigger probe, a quartz tuning fork with a microsphere tip vibrates at its resonant frequency, and is used as the sensing element. The resonance parameters of this quartz tuning fork (e.g., vibrating amplitude and resonant frequency) are extremely sensitive to external 3D microforces. The distinguished feature of this probe is its ability to interact with the sample surface in the actual three directions. The microsphere tip of the probe interacts with the sample surface in tapping mode in the Z direction, whereas it interacts in friction mode in the X and Y directions. The dynamic contact mechanism of the probe is based on interfacial force theory, and mechanical models of the interactions between the microsphere tip and sample surface in the X, Y, and Z directions are constructed and simulated. The experiment shows that the probe has sub-nanometer resolution in 3D directions and triggers repeatability of approximately 40 nm in each direction. Theoretical analysis and experimental results verify that this 3D resonant trigger probe can be used for true 3D profile measurement.

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Reduction of Liquid Bridge Force for 3D Microstructure Measurements

Cited by 12 publications

References 16 publications

Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

A Three-Dimensional Resonant Triggering Probe for Micro-CMM

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