Reduction of Electrostatic Control Voltage with a Tri-Electrode Actuator

Abstract

Abstract:We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force on the MEMS device, while the higher voltage on the drive electrode remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

“…Yu Zhou et al described the original design of the actuator with three electrodes (Figure 3). This typol ogy aims to decrease drive voltage; therefore, the drive appearance of an intermediat electrode with structural holes and its placement between the electrodes creates the de sired drive configuration system [73] (Figure 6). Another way was chosen by Wenguang Wang et al, who developed a mathematical model of the electrostatic actuator, using elec tric transparent film as an electrode.…”

Study of Electrostatic Actuator Voltage Reduction with a Tri-Electrode Actuator with Varying Pull-Down Voltage

“…A novel tri-electrode topology for the electrostatic actuator was introduced in [5] that can greatly reduce the controlling voltage. A perforated intermediate electrode (biased to Vi) is placed between the MEMS and the underlying pull-down electrode (biased to Vp).…”