Abstract:Employing a tri-electrode topology for electrostatic actuators can significantly reduce needed control voltages. The tri-electrode topology employs a perforated intermediate electrode between the MEMS structure and pull-down electrode, and provides a low voltage control for the MEMS structure. Simulations of a spring supported MEMS in a conventional electrostatic actuator offering ~4.5 µm displacement with 20 V on the pull-down electrode, were compared to the tri-electrode actuator. This study showed that the … Show more
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