Reducing the Effect of Parasitic Capacitance on MEMS Measurements

Rantakari, Pekka; Kiihamäki, Jyrki; Koskenvuori, Mika; Lamminmäki, Tuomas; Tittonen, Ilkka

doi:10.1007/978-3-642-59497-7_361

Cited by 14 publications

(7 citation statements)

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“…This fact allows the removal of the effect of parasitic feedthrough, which separates the parasitic and motional current in the frequency domain as has been demonstrated [4]. The approach proposed in this letter is based on the subtraction of the parasitic currents [2] provided by two MEMS resonators with the same physical dimensions taking advantage of the monolithical integration with an on-chip CMOS differential amplifier.…”

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confidence: 94%

“…Therefore, some efforts have been reported to reduce the parasitic current caused by the parasitic capacitance that generates not only degradation of the measured electric quality factor of the MEMS (Q) but also a shift in the resonance frequency. Two main approaches have been proposed to overcome this problem: a) implementation of differential sensing using two identical MEMS resonators [2] and b) use of the MEMS as a mixer due to its quadratic dependence on the applied voltage [3]. In this mixing approach, the excitation/actuation of the MEMS is done by two AC signals, neither of which is at the resonance frequency of the resonator, but their sum or difference corresponds to the MEMS resonant frequency.…”

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confidence: 99%

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Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Uranga¹,

Verd²,

Lopez³

et al. 2009

ETRI J

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confidence: 94%

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confidence: 99%

Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Uranga¹,

Verd²,

Lopez³

et al. 2009

ETRI J

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“…Here, we employed data post-processing technique to extract the motional signal. 18,19 Toward this, we first measure the S 21 signal using the network analyzer and save the data into the memory while keeping the DC bias to zero. In this case, the data only contain the parasitic feedthrough signal.…”

Section: A a Binary Comparatormentioning

confidence: 99%

Towards electromechanical computation: An alternative approach to realize complex logic circuits

Hafiz

Kosuru

Younis

2016

Journal of Applied Physics

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Electromechanical computing based on micro/nano resonators has recently attracted significant attention. However, full implementation of this technology has been hindered by the difficulty in realizing complex logic circuits. We report here an alternative approach to realize complex logic circuits based on multiple MEMS resonators. As case studies, we report the construction of a single-bit binary comparator, a single-bit 4-to-2 encoder, and parallel XOR/XNOR and AND/NOT logic gates. Toward this, several microresonators are electrically connected and their resonance frequencies are tuned through an electrothermal modulation scheme. The microresonators operating in the linear regime do not require large excitation forces, and work at room temperature and at modest air pressure. This study demonstrates that by reconfiguring the same basic building block, tunable resonator, several essential complex logic functions can be achieved.

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“…Since both signals are sinusoidal, their superposition gives a characteristic different from that of a single resonator ( figure 11, plot a). To separate the motional resonator response from the parasitic coupling signal, we have adapted the method described in [7]. Using the set-up shown in figure 10, we first measure the resonator response with V b = 0, i.e.…”

Section: Test Set-upmentioning

confidence: 99%

Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction

Galayko

Kaiser

Buchaillot

et al. 2002

J. Micromech. Microeng.

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This paper presents the design, fabrication and test of high-Q high-frequency lateral-mode clamped-clamped beam micro-resonators driven by parallel-plate electrostatic transducers fabricated in a thick epipoly technology. An innovative approach is employed to reduce an intrinsically high transducer gap value (>3.0 µm) required by the need of 15 µm thick structural layer etching down to 0.2-0.4 µm after the fabrication. This is achieved by employing an electrostatic motor that approaches the actuating and sensing electrodes close to the resonator. The electrode motor is driven with 30 V dc voltage, without any dc current consumption. Two resonators having a resonance frequency of 10 MHz have been fabricated with gap values of respectively 0.2 and 0.4 µm. A comparative analysis of performances of the two resonators is given in the paper.

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Reducing the Effect of Parasitic Capacitance on MEMS Measurements

Cited by 14 publications

References 1 publication

Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Towards electromechanical computation: An alternative approach to realize complex logic circuits

Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction

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