Recording different geometries of 2D hexagonal photonic crystals by choosing the phase between two-beam interference exposures

Abstract

2D hexagonal patterns can be generated by the superimposition of two or three fringe patterns that have been formed by two-wave interference and that have rotations of 60 degrees between them. Superimposing three exposures solves the problem of asymmetry in the cross section of structures, which is caused by double exposure. The resulting structure, however, depends on the phase shift of the third fringe pattern in relation to the previous two. We propose a method for controlling the phase shift, and we demonstrate that three different lattice geometries of hexagonal photonic crystals can be recorded when the phase is chosen.

Multiexposure laser interference lithography

“…39 In practice, to avoid tilting and to precisely rotate the sample, a He-Ne laser interferometer can be used. 39 In practice, to avoid tilting and to precisely rotate the sample, a He-Ne laser interferometer can be used.…”

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

“…For example, the lattice point geometry has been shown to affect the photonic-bandgap characteristics in photonic crystals [30][31][32][33][34][35][36][37][38][39][40][41][42][43][44][45], selective plasmonic excitation in plasmonic crystals [46], photonic crystal laser beam pattern [47] and polarization mode control [48], birefringence of photonic crystal fibers [49], cell behavior in tissue engineering [50], tuning of surface textures [51], magnetization switching in periodic magnetic arrays [52], and, negative refraction and superlensing in metamaterials [53,54]. Accordingly, several studies report analytical and computational methods to select individual beam parameters to change the motif orientation and shape [34,42,55,56] from hemispherical to hemielliptical [57]; circular to triangular [58]; as well as, general structures including micro-cavities, micro-bumps, and rectangular bumps [51]. Most recently, research has focused on the exact analytical design and fabrication of motifs with 2D geometries that vary from the shape of an ellipse to that of a rhombus [59].…”

Large‐Area Fabrication of Periodic Arrays of Nanoholes in Metal Films and Their Application in Biosensing and Plasmonic‐Enhanced Photovoltaics

“…In this work, we present a lithographic approach for the fabrication of both large area PANHs and microarrays of PANHs that is based on the interference of coherent radiation in the visible range. This interference lithography (IL) approach is commonly used for the generation of holographic gratings and other photonic structures 27, 28. The advantage of our fabrication methodology is that it relies in established optical methods for patterning, followed by conventional metal deposition and lift off.…”