Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

Abstract

Abstract:Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro-and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.

Optically monitoring and controlling nanoscale topography during semiconductor etching

“…Thus, point-measurement techniques such as spectroscopic ellipsometry, 1-4 phase-sensitive ellipsometry, 5 laser reflectometry, 6,7 multi-beam interferometry, 8,9 and emission spectroscopy 10,11 have been successfully implemented. Typically, the structure height is measured at a single point or region of interest and information across the wafer is inferred assuming the process is uniform.…”

Surface topography enhances differentiation of mesenchymal stem cells towards osteogenic and adipogenic lineages

“…Alternatively, direct multi-beam interference employs the modulated energy distribution by the interference pattern of laser beams to ablate the surface of a substrate. It allows the direct nanostructuring of most types of materials without the need of additional steps, thereby decreasing costs of periodic surface functionalization [18,19]. In contrast to common laser techniques, laser-interference is not limited by light diffraction and hence facilitates generation of subwavelength structures [20].…”

Directional bending wave propagation in periodically perforated plates

“…Such properties lead to unique wave propagation characteristics that can be exploited for the design of waveguides, filters, focusing devices, as well as structural assemblies with negative inertial properties and refractive characteristics. Thus, periodic structural configurations often form the basis for the design of metamaterials, and photonic and phononic crystals [1,2,3,4].…”