2013
DOI: 10.1155/2013/678361
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Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials

Abstract: X-ray reflectometry is a powerful tool for investigations on rough surface and interface structures of multilayered thin film materials. The X-ray reflectivity has been calculated based on the Parratt formalism, accounting for the effect of roughness by the theory of Nevot-Croce conventionally. However, in previous studies, the calculations of the X-ray reflectivity often show a strange effect where interference effects would increase at a rough surface. And estimated surface and interface roughnesses from the… Show more

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Cited by 5 publications
(3 citation statements)
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“…XRR is widely used to determine thickness, density and roughness of multilayer stacks on different types of crystalline and amorphous materials. 44,45 The incident angle of X-rays for XRR is varied a few degrees above and below the critical angle of reflection of the material under study. For a flat surface, the reflectivity shows a sudden decrease above the critical angle in proportion to θ X −4 , whereas for a rough surface, the reflectivity decays in a faster manner.…”
Section: X-ray Reflectivity (Xrr)mentioning
confidence: 99%
“…XRR is widely used to determine thickness, density and roughness of multilayer stacks on different types of crystalline and amorphous materials. 44,45 The incident angle of X-rays for XRR is varied a few degrees above and below the critical angle of reflection of the material under study. For a flat surface, the reflectivity shows a sudden decrease above the critical angle in proportion to θ X −4 , whereas for a rough surface, the reflectivity decays in a faster manner.…”
Section: X-ray Reflectivity (Xrr)mentioning
confidence: 99%
“…To obtain reliable data on the buried layers, we used the X-ray reflectivity (XRR) technique, which is well established and recognized for analysis of interface properties with subangstrom precision. , The XRR spectra were fitted using the standard procedure to obtain the interface parameters, including the average roughness amplitude of the entire sample (which is statistical) and the intermixing depth at each interface. The experimental and simulated XRR spectra for the sample with t W = 0.25 nm annealed at different temperatures are shown in Figure a.…”
Section: Resultsmentioning
confidence: 99%
“…[1][2][3][4] Neuhold et al proved that x-ray reflectivity is an excellent tool to investigate buried interfaces in organic electronic devices 5 although the interpretation of XRR measurements depends on a large number of parameters such as thickness and roughness and is therefore difficult. 1 Theoretical considerations discuss the influence of roughness in layer stacks 6,7 and demonstrate the impact of the roughness with decreasing thickness of the layers.…”
Section: Introductionmentioning
confidence: 99%