2021
DOI: 10.1007/s11837-021-04919-0
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Recent Developments in Femtosecond Laser-Enabled TriBeam Systems

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Cited by 26 publications
(10 citation statements)
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References 111 publications
(148 reference statements)
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“…The TriBeam system 3 , 14 is used for the collection of orientation fields in 3D over a half cubic millimeter volume. A schematic of the overall experiment is provided in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…The TriBeam system 3 , 14 is used for the collection of orientation fields in 3D over a half cubic millimeter volume. A schematic of the overall experiment is provided in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…In ZEISS systems, the laser unit exists as a secondary attached chamber to the FIB‐SEM chamber, allowing for correlation and reduction of contamination/detector damage in the main vacuum chamber. There are also systems with lasers integrated within (p)FIB‐SEMs, or TriBeam systems, 25 for an additional range of beams (and scales of material removal) to use in instruments. All of these instruments also have the flexibility and advantage of being ideal for preparing samples for other techniques, such as TEM, atom probe tomography (APT), and even nanotomography/XRM.…”
Section: Methods Of Sample Materials Removalmentioning
confidence: 99%
“…Very recently, femtosecond pulsed laser ablation has been introduced as a yet more powerful milling approach in dual-beam instruments [26]. While nanosecond lasers have been classically applied for material ablation, their characteristic pulse time enables a noticeable heat transfer to the milled solid, and undesired thermal affects as a consequence.…”
Section: Fib-sem Systems: Technical Developments and State-of-the-artmentioning
confidence: 99%