2022
DOI: 10.1016/j.cattod.2022.09.013
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FIB-SEM tomography in catalysis and electrochemistry

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Cited by 4 publications
(1 citation statement)
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References 77 publications
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“…Transmission electron (TEM) tomography [ 146 ] excels in the sub‐10 nm resolution regime, enabling detailed imaging of nanosized specimens, but is limited in the overall size that can be investigated. [ 147 ] FIB/SEM tomography can bridge the nanoscale to microscale domain with spatial resolutions ranging from a few to hundreds of nanometers. As depicted in Figure 14, volumes with edge lengths up to tens of micrometers [ 148 ] can be sliced with a slice width as small as several nanometers while recording a SEM image of the exposed cross‐sections with resolution down to 1 nm.…”
Section: Methodsmentioning
confidence: 99%
“…Transmission electron (TEM) tomography [ 146 ] excels in the sub‐10 nm resolution regime, enabling detailed imaging of nanosized specimens, but is limited in the overall size that can be investigated. [ 147 ] FIB/SEM tomography can bridge the nanoscale to microscale domain with spatial resolutions ranging from a few to hundreds of nanometers. As depicted in Figure 14, volumes with edge lengths up to tens of micrometers [ 148 ] can be sliced with a slice width as small as several nanometers while recording a SEM image of the exposed cross‐sections with resolution down to 1 nm.…”
Section: Methodsmentioning
confidence: 99%