Recent advances in traceable nanoscale dimension and force metrology in the UK

Abstract

It is now fully appreciated that metrology will play an integral role in the successful development and commercialization of micro- and nanotechnology. To this end, the UK Government, through the National Measurement System, funded several groundbreaking projects in its 2002–2005 Programme for Length. This paper will briefly describe the background of the research, concentrating on the technical details of the projects. The Programme for Length normally only funds work into dimensional metrology but this funding cycle also funded work into low force metrology as this area is crucial to most mechanical probing techniques. The projects described include a traceable areal contacting instrument designed to calibrate areal transfer artefacts and hence offer traceability for industrial areal instruments, the production of the areal transfer artefacts, the development of Internet-based softgauges for profile parameters, a primary low force balance with a force resolution of 50 pN and the development of methods for measuring complex micro-scale structures. Amongst others, the projects involved collaboration with PTB, TNO, Taylor Hobson, AWE, Rubert & Co. and the Universities of Warwick, Huddersfield and Eindhoven.

Mass and Force Measurement

“…Subsequently, balances have been developed at The Korea Research Institute of Standards and Science (KRISS) [39], PTB [40], NPL [41] and Centre for Measurement Science À International Technology Research Institute, Taiwan [42].…”

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

“…In addition to dimensional metrology tactile probing is of increasing importance for material and process metrology requiring traceable methods of force calibration in the range of nN to mN (Leach et al 2006). We therefore modified the described cantilever sensor and investigated it as a transferable force standard in comparison with the Fig.…”

Investigation of a small force standard with the mass based method

“…Generally, there are two kinds of small force standards in the micro-newton to nano-newton range: the first one is based on the mass method, such as the micro-force measuring devices at PTB [5], and NFC (the nano force calibrator) at KRISS [6]; the second one is based on the electrostatic force realization principle, such as the EFB (electrostatic force balance) at NIST [7], the primary low force balance at NPL [8], and the force measurement system at CMS [9]. The establishment of these SI traceable standards significantly improves the reliability of small force measurement results.…”