Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Abstract

A piezoresistive silicon cantilever-type tactile sensor was described as well as its application for dimensional metrology with high-aspect-ratio micro components and as a transferable force standard in the micro-to-nano Newton range. As an example for micro-/nanoscale tactile probing metrology the novel cantilever sensor was used for surface scanning with calibrated groove and roughness artifacts. Micro-/nano-Newton force metrology using the novel cantilever sensor was addressed with calibration procedures which were developed for low-force stylus instruments as well as for glass micro pipettes designed for the manipulation of isolated living cells.

Traceable characterization of a bending millimetre scale cantilever for nanoforce sensing

“…The small force measurement system described here has several features that differ from those of most nanonewton force measurement setups [2][3][4][5][6][7][8][9][10][11]. The device is robust, easy to handle and simple to use, and it can be modified for different applications.…”

“…However, many of the features of the AFM cantilever can be calibrated with a force calibrator operating in the nanonewton range [1,2]. The calibration is required because the stiffness of the AFM tips given by the manufacturer may differ as much as 100% from the measured value [11,22]. Traditional calibration methods have faced new challenges due to the miniature structure of the AFM probes.…”

Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration

“…Owing to its excellent mechanical characteristics mentioned above, silicon cantileverbased micro-force sensors [22][23][24][25] have long been developed and employed for probing force measurement. Most of them, however, are integrated or combined with different sensors for force measurement, which result in a relatively higher cost, lower environmental stability and poorer usability of these force sensors, especially for in situ applications.…”