Real-time stability and profile comparison measurements between two different LTPs

Abstract

The Long Trace Profiler (LTP) is a precise angle measurement instrument, with a sensitivity and accuracy that can be in the sub-micron radian range. LTP characteristics depend on the particular LTP system schematic design, and the quality of components and assembly. The conditions of temperature, alignment, and mirror support during the measurement proccess vary between different laboratories, which influences significantly the test repeatability and accuracy. In this paper we introduce a direct comparison method to test the same object at the same point in the same environment at the same time by using two LTPs, which significantly increases the reliability of the comparison. A compact, portable LTP (PTLTP), which can be carried to different laboratories around the world, is used for comparison testing. Stability comparison experiments between the LTP II at the National Synchrotron Radiation Research Center (NSRRC), and the PTLTP of Brookhaven National Laboratory (BNL) reveal significant differences in performance between the instruments. The experiment is set up so that each optical head simultaneously records both its own sample probe beam and also the probe beam from the other optical head. The two probe beams are reflected from same point on the mirror. Tests show that the stability of the PTLTP with a monolithic beam splitter is 10 times better than the stability of the LTP II which has a separated beam splitter unit. A scheme for comparing scanning measurements of a mirror is introduced. Experimental results show a significant difference between the two LTPs due mainly to distortions in the optical components inside the optical head. A new scheme is proposed for further mirror comparison scanning tests.

Developing bendable air bearing slide supporting long trace profiler to compensate gravity effect during measuring process

“…We directly used LTP as a measurement tool. The LTP was designed by Dr. Peter Tacks (BNL) and made at the NSRRC in Taiwan by Qian and Wang (2005) [8]. Several years after the upgrade, most optical components have high precision.…”