To achieve an ultrahigh resolution of a beamline for soft X-rays at the Taiwan Photon Source (TPS), the profile of a highly precise grating is required at various curvatures. The slope error could be decreased to 0.1 µrad (rms) at a thermal load with a specially designed bender having 25 actuators. In the meantime, a long-trace profiler (LTP) was developed in situ to monitor the grating profile under a thermal load; it consists of a moving optical head, an air-bearing slide, an adjustable stand, and a glass viewport on the vacuum chamber. In the design of this system, a test chamber with an interior mirror was designed to simulate the chamber in the beamline. To prevent an error induced from a commercial viewport, a precision glass viewport (150CF, flatness 1/150 λ rms at 632.8 nm) was designed. The error induced from the slope error of the glass surface and the vacuum deformation was also simulated. The performance of the optical head of the LTP in situ (ISLTP) has been tested in the metrology laboratory. The sources of error of this LTP including the linearity and the glass viewport were corrected after the measurement. For the beamline measurement, an optical head was mounted outside the vacuum chamber; the measuring beam passed through the glass viewport to measure the grating profile in vacuum. The measurement of the LTP after correction of the above errors yielded a precision about 0.2 µrad (rms). In a preliminary test, an ISLTP was used to measure the grating profile at soft X-ray beamline TPS45A. The measured profile was for the bending mechanism to optimize the slope profile. From the measured energy spectrum, the slope error of the grating was estimated with software for optical simulation to be about 0.3 µrad (rms), consistent with our estimate of the ISLTP. In the future, it will be used to monitor the thermal bump under a large thermal load. In addition, an ISLTP was used to monitor the properties of optical elements—the twist and radius in the beamline during the installation phase.
The Long Trace Profiler (LTP) is a precise angle measurement instrument, with a sensitivity and accuracy that can be in the sub-micron radian range. LTP characteristics depend on the particular LTP system schematic design, and the quality of components and assembly. The conditions of temperature, alignment, and mirror support during the measurement proccess vary between different laboratories, which influences significantly the test repeatability and accuracy. In this paper we introduce a direct comparison method to test the same object at the same point in the same environment at the same time by using two LTPs, which significantly increases the reliability of the comparison. A compact, portable LTP (PTLTP), which can be carried to different laboratories around the world, is used for comparison testing. Stability comparison experiments between the LTP II at the National Synchrotron Radiation Research Center (NSRRC), and the PTLTP of Brookhaven National Laboratory (BNL) reveal significant differences in performance between the instruments. The experiment is set up so that each optical head simultaneously records both its own sample probe beam and also the probe beam from the other optical head. The two probe beams are reflected from same point on the mirror. Tests show that the stability of the PTLTP with a monolithic beam splitter is 10 times better than the stability of the LTP II which has a separated beam splitter unit. A scheme for comparing scanning measurements of a mirror is introduced. Experimental results show a significant difference between the two LTPs due mainly to distortions in the optical components inside the optical head. A new scheme is proposed for further mirror comparison scanning tests.
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