RBS and ERD analysis using lithium ions

Liu, J.R.; Zheng, Zongshuang; Zhang, Z.H.; Chu, W. K.

doi:10.1016/0168-583x(94)95784-3

Cited by 10 publications

(2 citation statements)

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“…It is known that using the proton beam for RBS increases the analysed depth, but resolution by mass is decreased [3]. The advantages of using ions heavier than He + for the RBS analysis with a noticeable improvement of mass resolution and sensitivity in RBS are well known [4]. E. Norbeck had shown that the distribution of elements as a function of distance from the surface is more clearly revealed with 7 Li than 4 He [5].…”

Section: Introductionmentioning

confidence: 99%

“…The advantages of using ions heavier than He + for the RBS analysis with a noticeable improvement of mass resolution and sensitivity in RBS are well known [4]. E. Norbeck had shown that the distribution of elements as a function of distance from the surface is more clearly revealed with 7 Li than 4 He [5]. On the other hand, Hiroaki noted that the energy resolution of the detector generally decreases as the projectile mass increases if a silicon surface-barrier detector is used [6].…”

Section: Introductionmentioning

confidence: 99%

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Application of Li ion beam obtained by the cesium sputtering source for RBS analysis of optical layers

Gaspariūnas¹,

Kovalevskij²,

Birzul³

et al. 2015

Lith. J. Phys.

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High energy Li ions of multiple charge states (Li + , Li 2+ and Li 3+) were produced in a tandem accelerator from a source of negative ions by a cesium sputtering (SNICS) ion source. The negative ion current of Li ions up to 32 nA was obtained in the preacceleration stage after the inflection magnet and retractable aperture. The current of the high energy ion beam obtained after acceleration and used for RBS spectra measurements was up to 3 nA. The Li target cone production procedure and design are presented in this work. Initial experiments using Li RBS were performed and their results indicate enhanced analytical application capabilities of RBS for an optical coating analysis, compared to the conventional proton RBS.

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