Rastersondenmikroskopie als Meßtechnik für Mikro- und Nanostrukturen

Abstract

Schlagwörter: Rastersondenmikroskopie, Mikrometrologie, kapazitive Sensoren, Interferometer, Mikrohärte, Mikrorauheit Mit Hilfe eines interferometrisch kalibrierten Rastertunnelmeßmikroskops mit positionsgeregelten Stellgliedern für die Rasterbewegung können Meßaufgaben der Mikrometrologie mit hoher Genauigkeit bearbeitet werden. Mit Hilfe dieses Gerätes sind rückführbare Längen-messungen an Mikrostrukturen mit Meßunsicherheiten bis in den Nanometerbereich möglich. Beispielhaft werden Anwendungen in der Mikrohärtemessung und der Rauheitsmessung gezeigt. Scanning probe microscopy as measuring means for micro-and nanostructuresA scanning tunneling microscope, equipped with position-controlled scanners, processes measuring tasks of micrometrology with high precision. This device makes traceable length measurements on microstructures possible with measurement uncertainties in the nanometer range. Application examples in microhardness-and in roughness-measurement are demonstrated.

Accurate and traceable calibration of one-dimensional gratings

“…A simple phase correct low-pass filter has therefore been developed and used for detecting the waviness artefact W i . The algorithm is given in equation (2). To demonstrate the efficiency of this algorithm, an original measured profile and the calculated waviness artefact using equation (2) are shown in figure 5(a).…”

“…Therefore, several national metrology institutes (NMIs) have developed metrological SPMs [2][3][4][5][6][7][8][9][10][11], metrological scanning electron microscopes (SEMs) [12] and metrological profilometers [13]. A number of research activities and fruitful results have been reported [14][15][16][17][18].…”

Accurate and traceable measurement of nano- and microstructures

“…They usually have embedded laser interferometers for position measurement and control, and are thus capable of performing quantitative traceable dimensional measurements. Several 'metrological SPMs' have been built in national metrological institutes (NMIs) worldwide [9][10][11][12][13][14][15][16].…”

Measurement of micro-roughness using a metrological large range scanning force microscope

“…Stylus profilometry is a traditional method with a history of more than 70 years. It usually uses a diamond tip, 1 Author to whom any correspondence should be addressed.…”

“…However, the poor behaviour of the piezos, such as creep, nonlinearity and hysteresis, limited the accuracy of these SFMs. As SFMs are used increasingly for industrial applications and are required to give quantitative dimensional results, a new generation of SFMs with metrological capability has been developed based on high precision position sensors, such as capacitive sensors [1], strain gauges and differential inductive transducers. However, these position sensors have to be carefully calibrated before they can be used to provide quantitative results.…”