Measurement of micro-roughness using a metrological large range scanning force microscope

Abstract

A new method for traceable measurement of micro-roughness by using a newly developed metrological large range scanning force microscope (LR-SFM) is described. The LR-SFM has an Abbe error free design and direct interferometric position measurement capability, and is capable of measuring samples in a volume of 25 mm × 25 mm × 5 mm along x, y and z axes. The instrumentation and several important design concepts are introduced in this paper. Measurement results of a plane glass and a micro-roughness standard have illustrated that the instrument has a low noise level of R a = 0.58 nm and good measurement repeatability. Furthermore, a group of comparison measurements on a micro-roughness standard have been carried out between the LR-SFM and a stylus profiler. The obtained roughness values from both instruments are in excellent agreement with each other. This LR-SFM overcomes the difficulty that roughness values measured by conventional SFMs cannot be compared to stylus profilers or interference microscopes, mainly due to the fact that conventional SFMs do not have the required scanning range of ISO standardized evaluation methods.

Accurate and traceable measurement of nano- and microstructures

“…Fortunately the LR-SPM has a large measurement range of up to 25 mm × 25 mm in the xy-plane. Several investigations on microroughness measurements using the LR-SPM have been carried out, and the results showed an excellent agreement with that of a PTB stylus profilometer [23]. Figure 9 illustrates another example of microroughness measurement on a cylinder liner of a car engine using LR-SPM.…”

Morphological Dilation as Fractal Scaling in Roughness Measurement

“…The scaling regions are result from the secular relation between nearby points of the surface and the points of the tip and the scaling regions are related to internal variations of Yashchuk surface:for the scaling region I is the system chaotic and the information loss of the scaling region II shows that the system here is already fixed [14].…”

Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation

“…The scanning range of the roughness measurement needs to be determined in a way to allow evaluation length to cover twenty to fifty cycles of RSm. If Ra and RSm cannot be obtained, the sample is the out of the application scope of JIS R 1683:2007 and the measurement is over at step (2). (3) Tip test: Fig.…”

“…Recently more precise and reliable surface roughness measurements have been required [1][2][3]. In some cases, AFMs are calibrated by using calibrated pitch and height standards to further enhance reliability of surface roughness measurements.…”