Rastersondenmetrologie: Vom metrologischen Rasterkraftmikroskop zum Mikro- und NanokoordinatenmessgerätScanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM

Dai, Gaoliang; Bütefisch, Sebastian; Pohlenz, Frank; Danzebrink, Hans‐Ulrich; Koenders, Ludger

doi:10.1524/teme.2009.0921

Cited by 3 publications

(1 citation statement)

References 5 publications

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“…Similarly magnetic drives, called voice coil actuators, due to their similarity with loudspeaker principle operate with displacement integrating the drive current. This can be considered an equivalent to the incremental principle, extending the dynamic range without sacrificing resolution [19,20]. Even larger range systems have been designed, they can be seen as small 3D coordinate measuring systems targeting the micro-, not the nanoworld [21][22][23].…”

Section: Conceptsmentioning

confidence: 99%

Multiaxis interferometric displacement measurement for local probe microscopy

et al. 2011

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Ê Ú ¾ ÂÙÒ ¾¼½½ ÔØ ½¾ ÇØÓ Ö ¾¼½½ ×ØÖ ØWe present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

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Section: Conceptsmentioning

confidence: 99%

Multiaxis interferometric displacement measurement for local probe microscopy

et al. 2011

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Six-axis interferometric coordinates measurement system for nanometrology

et al. 2014

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We present an overview of approaches to the design of nanometrology coordinates measuring setup with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro-and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The practical measurement results of active compensation system for positioning angle errors suppression are presented as well as the analysis of overall achievable parameters. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

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Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

Lazar

Klapetek

Valtr

et al. 2014

Sensors

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We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 × 200 × 10) μm. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.

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Rastersondenmetrologie: Vom metrologischen Rasterkraftmikroskop zum Mikro- und NanokoordinatenmessgerätScanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM

Cited by 3 publications

References 5 publications

Multiaxis interferometric displacement measurement for local probe microscopy

Multiaxis interferometric displacement measurement for local probe microscopy

Six-axis interferometric coordinates measurement system for nanometrology

Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

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