Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining

Kruusing, Arvi; Leppaevuori, Seppo; Uusimäki, A.; Uusimaki, Matti

doi:10.1117/12.341285

Cited by 15 publications

(7 citation statements)

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“…Using abrasive jet machining with a free jet and contact masks, it is shown that it is possible to make 50-lm-wide ribs on the glass and 100-lm-wide slits on 40-lm-thick LiTaO3, with 100 times higher processing speed than can be achieved by other deep micromachining methods (such as RIE, ion-milling, and wet chemical etching) [7]. Also, powder blasting is considered the only feasible technique to create thousands of holes at once with a low cost, high speed, and high accuracy for the production of Zeus panels [8].…”

Section: Introductionmentioning

confidence: 99%

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

Park

Cho

Lee

2004

The International Journal of Advanced Manufacturing Technology

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Sandblasting, a conventional technique which is used for paint or scale removing, deburring, and glass decorating, has recently been developed into a powder blasting technique for brittle materials capable of producing micro-structures larger than 100 lm. This article describes an investigation of the effects of the impact angle of particles, the scanning times, and the standoff distance on the surface roughness, the weight-loss rate of samples with no mask, and the wall profile and overetching of samples with different mask patterns in powder blasting of soda-lime glass. The parameters are the various impact angles between 50 and 90°, the scanning times of a nozzle up to 40, and the standoff distances between 70 and 100 mm. The widths of the mask pattern are 0.2 mm, 0.5 mm, and 1 mm. The powder used is Al2O3 sharp particles, WA#600. The mass flow rate of powder during the erosion test is constant at 175 g/min and the blasting pressure of the powder is 0.2 Mpa. After a series of necessary experiments are performed, the results are investigated and analysed. As a result, a fundamental basis is established that can be applied to powder blasting to produce micro-mechanical parts of glass.

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Section: Introductionmentioning

confidence: 99%

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

Park

Cho

Lee

2004

The International Journal of Advanced Manufacturing Technology

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“…Powder blasting, with small particles ( 4 0 0 pm), is used for e.g. device demarking in electronic industry, surface preparation prior to plating (without mask) but also rapid prototyping [2] and flat panel display production [1] [3] (with mask). In research, powder blasting is widely used to determine the wear rate of industrial materials.…”

Section: Introductionmentioning

confidence: 99%

High resolution powder blast micromachining

Wensink

Berenschot²,

Jansen³

et al.

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blasting with 9 pm particles (compared with 30 pm particles) result in a higher slope of the channel sidewall. The aspect ratio of powder blasted channels was increased by using the high resistance of the copper mask in combination with the use of 9 pm particles. Furthermore, our measurements show how the blast lag (small channels etch slower compared to wider channels) is decreased by using smaller particles.

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“…This technique is faster and cheaper than other microfabrication processes and has been widely used in applications such as electrical device marking, flat panel display production, etc [3]. These features make micropowder blasting using a patterned mask an attractive option in the field of micro electromechanical system (MEMS) microfabrication [4][5][6]. In addition, a dry film [7] of negative resist based on polyurethane and electroplated metal masks [8] has also been used as a micropowder blasting mask.…”

Section: Introductionmentioning

confidence: 99%

Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip

Yagyu

Sugano

Hayashi

et al. 2005

J. Micromech. Microeng.

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We present a new rapid prototyping technique without a photolithography step to produce a glass chip with high aspect ratio channel for a micro total analysis system (µTAS). This technique consists of a powder blasting technique and direct laser patterning of Au nanoparticles dispersed polymer mask technique, and is useful in the development stage of a glass chip. The mask thickness and powder blasting condition were optimized for the fabrication of a glass chip with a higher aspect ratio channel. Under the optimized processing condition, the microchannel with a maximum aspect ratio of 2.1 in a glass substrate was successfully realized. The proposed technique was applied to a glass chip for electrophoresis and its performance for DNA separation analysis was confirmed.

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Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining

Cited by 15 publications

References 0 publications

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

High resolution powder blast micromachining

Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip

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